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1、SemiconductorsforMicroandNanotechnology—AnIntroductionforEngineersSemiconductorsforMicroandNanotechnology—AnIntroductionforEngineersJanG.KorvinkandAndreasGreinerAuthors:Prof.Dr.JanG.KorvinkDr.AndreasGreinerIMTEK-InstituteforMicrosystemIMTEK-InstituteforMicrosystemTechnologyTechnologyFa
2、cultyforAppliedSciencesFacultyforAppliedSciencesAlbertLudwigUniversityFreiburgAlbertLudwigUniversityFreiburgD-79110FreiburgD-79110FreiburgGermanyGermanyThisbookwascarefullyproduced.Nevertheless,authors,editorsandpublisherdonotwarranttheinformationcontainedthereintobefreeoferrors.Reader
3、sareadvisedtokeepinmindthatstatements,data,illustrations,proceduraldetailsorotheritemsmayinadvertentlybeinaccurate.LibraryofCongressCardNo.:appliedfor.BritishLibraryCataloguing-in-PublicationData:AcataloguerecordforthisbookisavailablefromtheBritishLibrary.DieDeutscheBibliothek—CIP-Cata
4、loguing-in-PublicationDataAcataloguerecordforthisbookisavailablefromDieDeutscheBibliothek.ISBN3-527-30257-3©WILEY-VCHVerlagGmbH,Weinheim2002Printedonacid-freepaper.Allrightsreserved(includingthoseoftranslationintootherlanguages).Nopartofthisbookmaybereproducedinanyform—byphotoprinting,
5、microfilm,oranyothermeans—nortransmittedortranslatedintomachinelanguagewithoutwrittenpermissionfromthepublishers.Registerednames,trademarks,etc.usedinthisbook,evenwhennotspecificallymarkedassuch,arenottobeconsideredunprotectedbylaw.Printing:StraussOffsetdruckGmbH,MörlenbachBookbinding:Li
6、tges&DopfBuchbindereiGmbH,HeppenheimPrintedintheFederalRepublikofGermanyDedicatedtoMichelinePfister,MariaCristinaVecchi,SeanandNicolasVogel,SarahMariaGreinerandinfondmemoryofundimGedenkenanGerritJörgenKorvinkGertrudMariaGreinerContentsContents7Preface13Chapter1Introduction15TheSystemCon
7、cept.............................16PopularDefinitionsandAcronyms..................19SemiconductorsversusConductorsandInsulators........19TheDiodeFamily..................................20TheTransistorFamily..............................20PassiveDevices.................................
