Introduction to Nanotechnology (1)

《Introduction to Nanotechnology (1)》由会员上传分享，免费在线阅读，更多相关内容在学术论文-天天文库。

1、IntroductiontonanotechnologyHenrikBruusMIC–DepartmentofMicroandNanotechnologyTechnicalUniversityofDenmarkLyngby,spring2004iiPrefaceInthespring2002MIClaunchedanewfourthsemestercourseattheTechnicalUniversityofDenmark(courseno.33320,10ECTS)toprovideageneralandbroadintroductiont

2、othemulti-disciplinaryfieldofnanotechnology.Thenumberofstudentsattendingthecoursehasgrownsteadilyfrom24in2002,to35thefollowingyearandnowmorethan50in2004.Basedonthefeed-backfromthestudentsIhavechangedpartofthecourseandexpandedthelecturenotes.Theaimofthecourseremainsthesame.Iti

3、sintendedforstudentswhohavecompletedthreesemestersinanyengineeringorsciencestudyprogrammeatcollegelevel.Duringthecoursethestudentswillbeintroducedtomanyfascinatingphenomenaonthenanometerscale,andtheywillhopefullyacquirebasicknowledgeofthetheoreticalconceptsandexperimentaltec

4、hniquesbehindtherecentvastlyimprovedabilitytoobserve,fabricateandmanipulateindividualstructuresonthenanometerscale.Thefirstpartofthecourse,whichiscoveredbytheselecturenotes,isanintroductiontothetop-downapproachofmicroelectronicsandmicromechanics.HereselectredtopicsliketheAFMa

5、ndquantumtransportarestudiedinsomedetail.Thesecondparthasamuchbroaderfocus.Heretheaimistogivethestudentsanoverviewoftheon-goingmergeofthetop-downapproachwiththebottom-upapproachofchemistry/biochemistry;adevelopmentthatiscreatingnewandexcitingcross-disciplinaryresearchfieldsan

6、dtech-nologies.MuchofthematerialusedinthispartofthecourseisprovidedbyguestlecturersHenrikBruusMIC–DepartmentofMicroandNanotechnologyTechnicalUniversityofDenmark26January2004iiiivPREFACEContents1Top-downmicroandnanotechnology11.1MicrofabricationandMoore’slaw..................

7、......31.2Cleanroomfacilities...............................41.3Photolithography.................................51.4Electronbeamlithography............................61.5Nanoimprintlithography.............................82Abriefintrotoquantumphysics112.1Theparticle-wavedu

8、ality............................112.2deBrogliewaves.......................