欢迎来到天天文库
浏览记录
ID:39505368
大小:1.78 MB
页数:105页
时间:2019-07-04
《Introduction to Nanotechnology (1)》由会员上传分享,免费在线阅读,更多相关内容在学术论文-天天文库。
1、IntroductiontonanotechnologyHenrikBruusMIC–DepartmentofMicroandNanotechnologyTechnicalUniversityofDenmarkLyngby,spring2004iiPrefaceInthespring2002MIClaunchedanewfourthsemestercourseattheTechnicalUniversityofDenmark(courseno.33320,10ECTS)toprovideageneralandbroadintroductiont
2、othemulti-disciplinaryfieldofnanotechnology.Thenumberofstudentsattendingthecoursehasgrownsteadilyfrom24in2002,to35thefollowingyearandnowmorethan50in2004.Basedonthefeed-backfromthestudentsIhavechangedpartofthecourseandexpandedthelecturenotes.Theaimofthecourseremainsthesame.Iti
3、sintendedforstudentswhohavecompletedthreesemestersinanyengineeringorsciencestudyprogrammeatcollegelevel.Duringthecoursethestudentswillbeintroducedtomanyfascinatingphenomenaonthenanometerscale,andtheywillhopefullyacquirebasicknowledgeofthetheoreticalconceptsandexperimentaltec
4、hniquesbehindtherecentvastlyimprovedabilitytoobserve,fabricateandmanipulateindividualstructuresonthenanometerscale.Thefirstpartofthecourse,whichiscoveredbytheselecturenotes,isanintroductiontothetop-downapproachofmicroelectronicsandmicromechanics.HereselectredtopicsliketheAFMa
5、ndquantumtransportarestudiedinsomedetail.Thesecondparthasamuchbroaderfocus.Heretheaimistogivethestudentsanoverviewoftheon-goingmergeofthetop-downapproachwiththebottom-upapproachofchemistry/biochemistry;adevelopmentthatiscreatingnewandexcitingcross-disciplinaryresearchfieldsan
6、dtech-nologies.MuchofthematerialusedinthispartofthecourseisprovidedbyguestlecturersHenrikBruusMIC–DepartmentofMicroandNanotechnologyTechnicalUniversityofDenmark26January2004iiiivPREFACEContents1Top-downmicroandnanotechnology11.1MicrofabricationandMoore’slaw..................
7、......31.2Cleanroomfacilities...............................41.3Photolithography.................................51.4Electronbeamlithography............................61.5Nanoimprintlithography.............................82Abriefintrotoquantumphysics112.1Theparticle-wavedu
8、ality............................112.2deBrogliewaves.......................
此文档下载收益归作者所有