LCoS屏的工艺制备与特性分析

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1、东南大学硕士学位论文AbstractThetechnologyofliquidcrystalonsilicon(LCoS)isakindofreflectiveliquidcrystaldisplaytechnologies．ItiSthecombinationofCMOSsemi-conductorICandliquidcrystaldisplaytechnology．Ithasthebenefitsofhighdensity，highresolution，highbrightness，lowcostandSOon．LCoSisoneofthe

2、keytechnologyforprojectionandmicrodisplaysystem，andithasbroadmarketprospects．TheworkingprincipleofTFT-LCDisintroducedfirstly,followedbyin-depthunderstandingofthedisplayprincipleandthefabricationofLCoS．Atthesametime，thetheoryanddrivingmodetoachievecolordisplayusingLCoSisexplai

3、ned．SomedisplaymodesforLCoSareanalyzedindetailandselected．ThePCE(polarizingconversionefficiency)curveforeachmodeiSsimulatedbyMatlabtojudgetheoddsoftheworkmode．Inaddition，theresultscouldworkastheguidanceforprocessingparametersforLCoS．Aftertheanalyzingofparameters，thewholeproce

4、ssofLCoShasbeenpreparedbyusingtheequipmentofpaneldisplay．Thetechnicparameters，particularlythekeyprocessingwhichdecisivelyinfluencereflectance----thecellgap，thic：knessofPIandthepressureforlaminationareconfirmed．TheLCoSdisplaypanelhasbeencompleted．Anequipmentsystemisbuiltfortes

5、tingtheoptoelectroniccharacteristicsofLCoSdisplaypanel．Thereflectance—voltagecurve(RVC)oftheLCoSworkingunderdifferentmodesisachievedbythissystem．ThesuggestionforfurtherimprovementiSproposedaftertheanalysisandcomparisonsoftestingresults．Insummary,takingLCoSpanelastheobjectofst

6、udy，theworkingmechanismisresearchedfirstly．ThekeyprocessingparametersareanalyzedthroughsimulationastheguidanceoftheLCoSpanelassemble．TheRVCistestedbytheself-builttestingsystem．Allofthesearethesoundfoundationforfurtherstudy．Keywords：LCoS，operationmodesofLCoS，technicsofLCoS，opt

7、oelectroniccharacteristicsII2．2LCoS显示技术⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯l32．2．1TFTAMLCD屏的结构⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯132．2．2TFT-LCD工作原理⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯142．2．3LCoS的结构⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．142．2．4LCoS的彩色显示方式⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯．152．3LCoS工作模式分析设计⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯

8、⋯⋯⋯l62．3．1同向模式分析⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯⋯l72．3．2450-twist模式⋯⋯⋯⋯⋯⋯⋯