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ID:38178204
大小:215.59 KB
页数:6页
时间:2019-05-24
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1、GDMSGlowDischargeMassSpectrometrySpecialistsinMaterialsCharacterizationLowPressureGlowDischargeIonSourceArgonAre-Ar*NegativeGlowAr+hnnnAr*Ar+M0M+M0MagneticSectorMagneticSectorM+MassAnalyzerM0M+MassAnalyzerAr+Ar+Ar+Ar+M0Ar*SampleM+DarkSpacee-Anode•Theglowdischargesourceservesasaverystablesourceofanal
2、yteionswithnoorminimalinfluenceofasamplepropertiesonanalyticalcharacteristics.•Thesampleisatomizedintheglowdischargeuniformly,layerbylayer.•Thesputteredspecies(predominantlyneutralatoms)diffuseintoaplasmawheresubsequentlyareionized.•Intheglowdischargesourcessputteringandionizationprocessesareseparat
3、edintimeandspace,whichleadstonegligiblematrixeffects.•Theglowdischargeworksasanatommillwithsputterratesintheorderof0.1-1microns/min.©Copyright2007EvansAnalyticalGroupLLC2ModelVG9000Schematically-LowPressureGDIonSource-LowPressureGDIonSource-ReverseNier-JohnsonGeometry-ReverseNier-JohnsonGeometry-Dou
4、bleFocusing-DoubleFocusing-DualDetectorw/AutomaticSwitching-DualDetectorw/AutomaticSwitching©Copyright2007EvansAnalyticalGroupLLC3TypicalApplicationsTraceandultra-traceelementdeterminationsinhighpuritymetals,alloys,manufacturedcarbonsandgraphites,semiconductormaterials,variousoxides,carbidesandcera
5、mics.Elementdepthprofilingofflatsurfacesformajor,minorandtraceelements.IdentificationofunknownsfromminuteamountofspecimenFullelementcharacterizationofpowdersorparticulatematerials©Copyright2007EvansAnalyticalGroupLLC4TypicalAnalyticalReportsTaIngotGaAsWafer©Copyright2007EvansAnalyticalGroupLLC5Su
6、mmaryDirectsolidsanalysisofadvancedmaterialsbyhighresolutionGDMStechniquescanprovidepreciseandaccurateanalyticaldatafortraceandultradatafortraceandultra-datafortraceandultra---traceelementswithoutlengthyandtraceelementswithoutlengthyandpotentiallyhazardoussamplepreparations.Screeningdata,including
7、traceandultraScreeningdata,includingtraceandultra-Screeningdata,includingtraceandultra---traceelements,canbetraceelements,canbeobtainedbyGDMSevenwhenproperreferencematerialsarenotavailable.NonNon-Non
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