mems固体化学微推进阵列的设计、制作及其性能-研究

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1、硕士论文MEMS固体化学微推进阵列的设计、制作及其性能研究AbstractWiththedevelopmentofmicro-nanosatellitetechnology,MEMSsolidpropellantthrusterarray，whichcallprovidesmallthrustandimpulse，hasbecomethehotspotofresearchpursued．A6x6MEMSsolidpropellantthrusterarraywasfabricated，with36／cm2unitintegr

2、ation．Theignitionandmicro—impulsetestsweresuccessfullycarriedout．Themaincontentsofthepaperareasfollows：(1)TheclassicalsandwichstructureWasusedinthedesignofmicrothrusterarray．AnignitionbridgeWasfabricatedonthejetnozzlearraylayer,whichCanimprovetheperformanceofthedev

3、ice；(2)ATMAH(tetramethylammoniumhydroxide)solutionWasstudied,anoptimized‘'two—step”etchingprocessWasobtained，whichhasbeensuccessfullyusedtofabricateadeepsiliconnozzle谢tlldepthof4851xm，surfaceroughnessis0．278pm，andaverageetchingrateis1．01gin／rain；(3)Takingtherupture

4、pressureandbondingstrengthintoaccount，thestrengthofthesiliconfilmWascalculated．AndasimpleandeffectivesiliconfilmthicknessprecisioncontroltechnologyWaspresented；(4)AU-shapedNi／CralloyignitionbridgeWasdesignedandfabricated，whichhasacompleteshapeandstableresistance；(5

5、)FireperformanceoftheignitionbridgeWasstudiedbyusingaCCDandinfraredimaging．Resultsshowthat：whenthevoltageis10Vthebridgefilmtemperatureriseslowly,andnotfusing；whileon30Vthebridgefilmtemperatureroseextremelyrapid，justin40msthetemperatureCanexceedover300"C，higherthant

6、heignitionpointofthepropellant；(6)A”three-dimensional”feedthroughWassuccessfullydesignedandprepared．Compared丽ththetraditionalfeedthrough，ithasmoreadvantagessuchassimpleindesign，scalable，andeasyincontrol；(7)Thenozzlelayerandchamberlayerwerebondedtogetherbyconductive

7、paste，whichCanrealizegoodelectricconductionandpromisesufficientsealingintensity．Improvingthethree—dimensionalprintingrapidprototypingtoachieveahighquality,hi曲efficiencymicrocharge；(8)Unitignitionandmicro—impulseweretestedbyusing30Vconstantvoltagetoexcite．Themeasure

8、daverageignitiondelaytimeislessthan50ms，and36unitstestedaretliAbstract硕士论文allreliablyfired，thesuccessrateis100％；Improvedamicro—impulsetestplatfor