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ID:34163672
大小:2.94 MB
页数:63页
时间:2019-03-03
《mems固体化学微推进阵列的设计、制作及其性能研究》由会员上传分享,免费在线阅读,更多相关内容在教育资源-天天文库。
1、硕士论文MEMS固体化学微推进阵列的设计、制作及其性能研究AbstractWiththedevelopmentofmicro-nanosatellitetechnology,MEMSsolidpropellantthrusterarray,whichcallprovidesmallthrustandimpulse,hasbecomethehotspotofresearchpursued.A6x6MEMSsolidpropellantthrusterarraywasfabricated,with36/cm2unitintegration.T
2、heignitionandmicro—impulsetestsweresuccessfullycarriedout.Themaincontentsofthepaperareasfollows:(1)TheclassicalsandwichstructureWasusedinthedesignofmicrothrusterarray.AnignitionbridgeWasfabricatedonthejetnozzlearraylayer,whichCanimprovetheperformanceofthedevice;(2)ATMAH(t
3、etramethylammoniumhydroxide)solutionWasstudied,anoptimized‘'two—step”etchingprocessWasobtained,whichhasbeensuccessfullyusedtofabricateadeepsiliconnozzle谢tlldepthof4851xm,surfaceroughnessis0.278pm,andaverageetchingrateis1.01gin/rain;(3)Takingtherupturepressureandbondingstr
4、engthintoaccount,thestrengthofthesiliconfilmWascalculated.AndasimpleandeffectivesiliconfilmthicknessprecisioncontroltechnologyWaspresented;(4)AU-shapedNi/CralloyignitionbridgeWasdesignedandfabricated,whichhasacompleteshapeandstableresistance;(5)Fireperformanceoftheignitio
5、nbridgeWasstudiedbyusingaCCDandinfraredimaging.Resultsshowthat:whenthevoltageis10Vthebridgefilmtemperatureriseslowly,andnotfusing;whileon30Vthebridgefilmtemperatureroseextremelyrapid,justin40msthetemperatureCanexceedover300"C,higherthantheignitionpointofthepropellant;(6)A
6、”three-dimensional”feedthroughWassuccessfullydesignedandprepared.Compared丽ththetraditionalfeedthrough,ithasmoreadvantagessuchassimpleindesign,scalable,andeasyincontrol;(7)Thenozzlelayerandchamberlayerwerebondedtogetherbyconductivepaste,whichCanrealizegoodelectricconductio
7、nandpromisesufficientsealingintensity.Improvingthethree—dimensionalprintingrapidprototypingtoachieveahighquality,hi曲efficiencymicrocharge;(8)Unitignitionandmicro—impulseweretestedbyusing30Vconstantvoltagetoexcite.Themeasuredaverageignitiondelaytimeislessthan50ms,and36unit
8、stestedaretliAbstract硕士论文allreliablyfired,thesuccessrateis100%;Improvedamicro—impulsetestplatfor
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