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1、中文4564字出处：第七届亚洲气溶胶会议论文集.2011附录英文文献翻译AnExperimentonEnergyReductionofanExhaustAirHeatRecoveryTypeOutdoorAirConditioningSystemforSemiconductorManufacturingCleanRoomsKyung-HoonYoo1,Gen-SooSong1,Hyung-TaeKim1,Seung-WooSon2andDug-JunPark31NanoscaleContaminationControlLaboratory,K
2、oreaInstituteofIndustrialTechnology(KITECH),1271-18,Sa-1-dong,Ansan-si,426-171,Gyeonggi-do,SouthKorea2SunglimPSCo.,1301,NamseongPlaza,345-30,Gasan-dong,Geumcheon-gu,Seoul,153-8023ShinsungENGCo.,404-1,Baekhyeon-dong,Bundang-gu,Seongnam-si,463-420ABSTRACTInrecentsemiconductor
3、manufacturingcleanrooms,theenergyconsumptionofanoutdoorairconditioningsystemrepresentsabout45%ofthetotalairconditioningloadrequiredtomaintainacleanroomenvironment.Meanwhile,thereisalargeamountofexhaustairfromacleanroom.Fromanenergyconservationpointofview,heatrecoveryfromthe
4、exhaustairisthereforeusefulforreducingtheoutdoorairconditioningloadforacleanroom.Inthepresentwork,anenergy-efficientoutdoorairconditioningsystemwasproposedtoreducetheoutdoorairconditioningloadbyutilizinganairwashertorecoverheatfromtheexhaustair.Theproposedoutdoorairconditio
5、ningsystemconsistedmainlyofapre-heater,anairwasher,twostagecoolingcoils,areheatingcoil,ahumidifierandtwoheatrecoverycoolingcoilsinsertedintotheairwasherandconnectedtoawetscrubber.Itwasshownfromthelab-scaleexperimentwithoutdoorairflowof1,000m3/hthattheproposedsystemwasmoreen
6、ergy-efficientforthesummerandwinteroperationsthananoutdoorairconditioningsystemwithasimpleairwasher.KEYWORDS:SemiconductorManufacturingCleanRoom,OutdoorAirConditioningSystem,AirWasher,HeatRecovery,EnergyReduction.IntroductionForrecentsemiconductormanufacturingcleanrooms,the
7、energyconsumptionofanoutdoorairconditioning(hereafterOAC)systemrepresentsabout45%ofthetotalairconditioningloadrequiredtomaintainacleanroomenvironment[1,2].Inaddition,thereisalargequantityofexhaustairfromacleanroom,leadingtotheconsequentlargeamountofwasteheat.Fromanenergysav
8、ingpointofview,heatrecoveryfromtheexhaustairisthereforehelpfulforreducingtheoutdoo
