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1、Effectofhydrogenadditiononthegrowthofpolymorphoussiliconsilicon-carbonalloysQijinCheng1,ShuyanXu2,andKostya(Ken)Ostrikov1,*1PlasmaNanoscienceCentreAustralia(PNCA),CSIROMaterialsScienceandEngineering,P.O.Box218,Lindfield,NSW2070,Australia.2PlasmaSourcesandApplicationsCentre,NIE,NanyangTec
2、hnologicalUniversity,1NanyangWalk,637616,Singapore.AbstractPolymorphoussiliconcarbonalloys(siliconnanocrystalsareembeddedintheanamorphoussiliconcarbidematrixwithSinanocrystalembeddedinit)weredepositedonquartzandsingle-crystalAlternativesincludemonocrystalline,orsingle-crystallinesilicons
3、ubstratessimultaneouslybyinductivelycoupledplasma-assistedchemicalvapordepositionfromthereactivesilaneandmethaneprecursorgasesdilutedwithhydrogenatasubstratetemperatureof200ºC.TheeffectofthehydrogendilutionratioX(Xisdefinedastheflowrateratioofhydrogentosilaneplusmethanegases),rangingfrom
4、0to10.0,onthecompositional,structural,optical,andmorphologicalpropertiesofthedepositedfilms,isextensivelyandsystematicallystudiedbyX-rayphotoelectronspectroscopy,X-raydiffraction,Ramanspectroscopy,Fouriertransforminfraredabsorptionspectroscopy,andscanningelectronmicroscopy.Itisshownthatw
5、iththeincreaseofthehydrogendilutionratioX,thecrystallinitydegreeandcrystallitesizeareincreasedwhilethecarboncontentandgrowthratearedecreased.Furthermore,aviablephysicalmechanismhasbeenproposedtoexplaintheobtainedexperimentalresults.Theseresultsarehighlyhighly-relevanttothedevelopmentofth
6、ethird-generationsolarcells,lightemittingdiodes,thin-filmtransistors,etcandotherapplications.28Keywords:chemicalvapordeposition;inductivelycoupledplasmas;siliconcarbonalloys;solarcells.*Electronicmail:Kostya.Ostrikov@csiro.au.28I.IntroductionPolymorphoussiliconcarbonalloys,whichconsistof
7、smallsiliconnanocrystalsembeddedintheanamorphoussiliconcarbidematrix,haverecentlyattractedagreatdealofinterestandhavebeenasubjectofextensiveinvestigationsowingtotheirimmenselypromisingapplicationsinthethird-generationsolarcells,lightemittingdiodes,thin-filmtransistors,and
