l42500-8zm型四管卧式pecvd技术说明书

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1、L42500-8/ZM型四管卧式PECVD技术说明书ZM481.149SM北京七星华创电子股份有限公司2010．03目录1、安全提示.....................................................................................................................11.1操作原则.........................................................................................

2、...................................................11.2安全标识............................................................................................................................................11.3安全保护开关.......................................................................

3、.............................................................22、概述.............................................................................................................................52.1产品特点.................................................................................

4、...........................................................52.2主要用途............................................................................................................................................52.3品种与规格................................................................

5、........................................................................52.4型号的组成及其代表意义................................................................................................................52.5环境条件.........................................................................

6、..................................................................62.6工作条件...........................................................................................................................................62.7对环境及能源的影响......................................................

7、.................................................................62.8安全措施...........................................................................................................................................63、结构特征与工作原理........................................................

8、........................................