l42500-8zm型四管卧式pecvd技术说明书

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1、L42500-8/ZM型四管卧式PECVD技术说明书ZM481.149SM北京七星华创电子股份有限公司2010．03目录1、安全提示.....................................................................................................................11.1操作原则...............................................................................................

2、.............................................11.2安全标识............................................................................................................................................11.3安全保护开关...................................................................................

3、.................................................22、概述.............................................................................................................................52.1产品特点...................................................................................................

4、.........................................52.2主要用途............................................................................................................................................52.3品种与规格........................................................................................

5、................................................52.4型号的组成及其代表意义................................................................................................................52.5环境条件.......................................................................................................

6、....................................62.6工作条件...........................................................................................................................................62.7对环境及能源的影响..........................................................................................

7、.............................62.8安全措施...........................................................................................................................................63、结构特征与工作原理................................................................................................