rairs chamber manual

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1、36RAIRSCHAMBERMANUALRev.January20053636Introduction3UltraHighVacuumEquipment3General3Gaskets3RemovingandRemountingFlange3Valves4Tubing4Manifold5Manipulator5PowerThermocoupleFeedthrough5SampleHolder5PressureGauges6Thermocouple6Iongauge7LeakDetection7PumpingSystem7Overview7MechanicalPumps7TurboMol

2、ecularPumps8CryogenicPumps9IRChamber9Overview9SampleManipulator10DosingofGasesandVapors10HowtoVenttheChamber11HowtoEvacuateandBakeOuttheChamber11HowtoRegeneratetheCryopump12OpeningtheChamber12ClosingtheChamberandBake-Out13HowtocleanthePt(111)surface13SputteringoftheSamplewithAr13AnnealinginOxyge

3、nandFlashing14MassSpectrometer:UTI100C14EngagingtheMS15StandbyMode15ShuttingDown15Calibration15SingleSpectra16TPD16Oscilloscope16TemperatureController17HowtoHeattheSample17HowtoCooltheSample18BiasingtheSample18HowtodoaRAIRSExperiment19Preparation21TheRAIRSExperiment21GettingStarted21Determinethe

4、SamplePosition21BackgroundSpectrum22SampleSpectrum22HowtodoaHigh-PressureRAIRSexperiment23Pressurizing23Pumping23MaintenanceandOccasionalThingstodo24ReplacingThermocoupleWiresandCopperRodsInsidetheManipulator24MassSpectrometerMaintenance.243636TakeofftheConeoftheMassSpectrometer.24PuttheConeBack

5、ontheMassSpectrometer.24Sodiumchloridewindows.25ReassembeltheSodiumChlorideWindows..25TroubleShooting.26Sampledoesnotheat..26Therecordedtemperaturedoesnotseemtobecorrect..26TheMSdoesnotworkproperly..26Thingstokeepaneyeon.27HeCompressor.27DryAirPurge.27AppendixA(LinearizedTemperaturewithOutputVol

6、tages.28AppendixB(ConversionTableforthe"TCPREAMPOUT"forTemperatureBelow0oC.28AppendixC(Software).29AppendixD(Vendors).33Aldrich..33AlconoxInc..33AVAC.33BioFlexInternational.33DuniwayStockroomCorp..33Fel-ProIncorporated.34KurtJ.LeskerCo.34InsulatorSealCorpation.34McMasterCarr.34MDCVacuumProductsC

7、orporation.34MKS.34NUPROCO..34PrecisionPlusVacuumComponents.34SanDiegoFluidSystemTechnologyCo..35SmallPartsInc..35Swagelok.35VacuumTechnologyInc..35UnitekMiyachiCorp.35AppendixE(References).353636IntroductionThisdocumentisin