PLD脉冲激光沉积简介.docx

PLD脉冲激光沉积简介.docx

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1、英文原文:CHAPTER1PulsedLaserDepositionofComplexMaterials:ProgressTowardsApplicationsDAVIDP.NORTONUniversityofFlorida,DepartmentofMaterialsScienceandEngineering,Gainesville,Florida1.1INTRODUCTIONInexperimentalscience,itisararethingforanewlydiscovered(orrediscovered)synthe

2、sistechniquetoimmediatelydeliverbothenhancedperformanceandsimplicityinuseinafieldofacceleratinginterest.Nevertheless,suchwasthecasewiththerediscoveryofpulsedlaserdeposition(PLD)inthelate1980s.Theuseofapulsedlaserasadirectedenergysourceforevaporativefilmgrowthhasbeene

3、xploredsincethediscoveryoflasers[HassandRamsey,1969;SmithandTurner,1965].Initialactivitieswerelimitedinscopeandinvolvedbothcontinuous-wave(cw)andpulsedlasers.Thefirstexperimentsinpulsedlaserdepositionwerecarriedoutinthe1960s;limitedeffortscontinuedintothe1970sand1980

4、s.Then,inthelate1980s,pulsedlaserdepositionwaspopularizedasafastandreproducibleoxidefilmgrowthtechniquethroughitssuccessingrowinginsituepitaxialhigh-temperaturesuperconductingfilms[Inametal.,1988].Thechallengesforinsitugrowthofhigh-temperaturesuperconductingoxidethin

5、filmswereobvious.Thecompoundsrequiredmultiplecationswithdiverseevaporativepropertiesthathadtobedeliveredinthecorrectstoichiometryinordertorealizeasuperconductingfilm.Simultaneously,thematerialwasanoxide,requiringanoxidizingambientduringgrowth.Pulsedlaserdepositionhad

6、severalcharacteristicsthatmadeitremarkablycompetitiveinthecomplexoxidethin-filmresearcharenaascomparedtootherfilmgrowthtechniques.Theseprincipleattractivefeatureswerestoichiometrictransfer,excitedoxidizingspecies,andsimplicityininitialsetupandintheinvestigationofarbi

7、tratryoxidecompounds.Onecouldrapidlyinvestigatethin-filmdepositionofnearlyanyoxidecompoundregardlessofthecomplexityofthecrystalchemistry.Significantdevelopmentofpulsedlaserdepositionhascontinuedandoverthepast15years,PLDhasevolvedfromanacademiccuriousityintoabroadlyap

8、plicabletechniqueforthin-filmdepositionresearch[Saenger,1993;Kaczmarek,1997;WillmottandHuber,2000;Dubowski,1988;Dielemanetal.,1992]

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