电子束镀膜机工作原理.ppt

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1、BasicoperationsofElectronbeamevaporatorWanghaominShenxiaonanBasicoperationprocedureCheckthepressureofnitrogengasesandCheckthevolumeofthecoolingwaterinthechiller.SystemloginVentthechamberLoadsampleSettherecipesRuntheprocesstodepositthinfilmsUnloadsamplesSetsampletostandbyChecktheN2pressurea

2、ndchillerwatervolumeWaterneedtobeaddedwhenthevolumeisbelowhalftank.Systemlogin1.Pressthe“enter”button2.InputyourusernameandpasswordVentthechamber3.OpentheN2valve2.Turnofftheautopump1.ClosetheMVvalveLoadthesample1.Openthedoorofthechamber2.HoldyoursampletothesampleholderSetandloadRecipe1.Ope

3、nfiletofindthematerialyouwanttodeposit2.Setthethicknessandrotaryspeedintherecipe,saveandloadtherecipeRuntheprocesstodepositthinfilms1.Gotomanualoperationtomakea“record”atfirst.2.Gotoprocessoperationtoruntherecipeloaded3.Observetheprocessthroughthewindow4.Adjustthee-beampositioninthecrucibl

4、ewhennecessaryUnloadthesamplesWaitthechambertempbelow50°C,ventthechamberandunloadthesample.Closethedoorofthechamberafterunloadthesample.ExittheSystem1.Makesuretheautopumpison.2.Makesurethehighvoltageisturnedoffbeforeexitthesystem.3.ExitthesystemMaterialsfordepositioninourevaporator