TFT-LCD工艺制程简介.pdf

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1、2013年12月26日星期四2009年04月21日1时44分37秒ContentsContents1.Arrayprocess周刚09-4-192.编写CellProcessModuleProcess3.TeamworkTeamwork客客户导户导向，向，团结协团结协作作精益生精益生产产，精益管理，精益管理TFTLCDTFT-LCDENGLISHTFT-LCDENGLISHADIRecipeTFT-LCDOICODF用中英文名称对照COGSTKTFT-LCD一一：：ArrayProcessArrayProcessOr

2、ganizationOrganizationArrayLayoutArrayLayoutTFTARRAYPROCESSTFTARRAYPROCESSC'TFTStructureStoragecapacitorITOpixelelectrodeCross-sectionC-C’a-SiTFTCSelectlineDatalinea-SiTFTarrayprocess–step1•DepositandpatterngateC'metal•Functions:–GateofTFT–Selectlines–Bottomelectro

3、deofstoragecapacitor•Metaloptions:Cross-sectionCC’–Ti/Al/TiC–Al/Mo–Cr–Moa-SiTFTarrayprocess–step2C'•DepositionofSiN/a-Si/n+byPECVD,patterningofa-Sia-Si/n+•SiNisgatedielectricandSiNstoragecapacitordielectricC–Selectiveetchofa-Si–SiNisnotetcheda-SiTFTarrayprocess–step3

4、C'•Depositionandpatterningofsource/drainmetal•Functions:–Sourceanddrainmetal–Datalinemetal•MetaloptionsC–Ti/Al/TiorTi/Al–Cr–MoorMo/Ala-SiTFTarrayprocess–step4C'•DepositionandpatterningofpassivationSiNbyPECVD•Function:–PassivateTFTCa-SiTFTarrayprocess–step5C'•Depositi

5、onandStoragecapacitorpatterningofITOITOpixelelectrode•Function:–Pixelelectrode–TopelectrodeofCross-sectionC-C’storagecapacitora-SiTFTCSelectlineDatalineTFTARRAYPROCESS___PVD/CVDTFTARRAYPROCESS___PVD/CVDRFpower13.56MHz~1mTorrAr+plasmaTargetholderSubstrateholderGlassTa

6、rgetUsedforITO(IndiumTinOxidetransparentconductor)andformetals(Al,Mo,Cr,etc.)PVD原理DCSputterdeposition~-100-1000V-V(DC)(glowdischarge)CathodeshieldSchematicdiagramofDCpoweredsputterdepositionequipmentVacuumgroundPECVD(即等离子体增强化学气相沉积)•工作原理:采用等离子辅助对化合物进行催化分解•目的:利用等离子体辅助活

7、化反应气体,降低反应温度,改善薄膜质量P/C/CPkP/CclodT/CaoLP/CP/CACLSPECVD原理影响成膜工艺的主要参数•温度•气体流量比(Si:H,N:H,Si:N)•RF•Pressure•Spacing(上下电极间距)LayerFeedgasMaterialTempFunction3LayerSiH,N,NHA-SiN320~350℃Gateinsulator423xSiH,Ha-SiSemiconductor42SiH,PH,Hn+a-SiContactlayeratsource432anddrain1La

8、yerSiH,N,NHA-SiN270~290℃passivation423xTFTARRAYPROCESS___PHOTOTFTARRAYPROCESS___PHOTO周刚09-4-19编写PSMU/CINPSASLITIDHP2COL2BUFEUVSCRCO