微细铣削加工再生颤振的研究.pdf

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1、机床与液压Dec．2012HydromechatronicsEngineeringVo1．40No．24DOI：10。3969／j．issn．1001-3881．2012．24．003ResearchonRegenerativeChatterinMicroMillingProcessCAOZiyang，LIHua，YINZhen，XIEOuCollegeofMechanicalandElectricalEngineering，SuzhouUnive~ityScienceandTechnology，Suzhou215011，ChinaAbstract：Micromilli

2、ngutilizestheminiatureendmilltofabricatecomplex3Dshapesathighrota．tionalspeed．Oneofthechalengesinmicromilingprocessistheregenerativechater，whichre．suitsinseveretoolwearandreducesthequalitiesoftheparfsfabricated．Thevariationsindy．namicsandcuaingcoe仟jcientsafectthechaterstability．Thedynami

3、cmillingforcemode／andthechaterstabilitydomainanal~icalmodelareconstructed，andthemachine．toolsystemfre．quencyresponsefunctionisobtainedthroughthemodaltesting．Theanalyticalsolutionofthechatterstabilitydomainisachievedbynumericalanalysiswithintegrateduseofmillingstabilitycri．terions．Finally

4、，theexperimentaltestsareperformedtosuppo~theproposedmodelandsimula．tionresults．Keywords：micromilling，regenerativechater，stabilityanalysismasks[1]．Duetothefragilenatureoftheminiature1．Introductiontools，evenaminutevibrationinmicromillingcanleadtopart‘failures．Micromillingexhibitanunsta—The

5、reisanincreasingdemandforfabricationofblephenomenoncalledregenerativechatter，duetominiaturecomponentsusingavarietyofengineeringtheundulationsonapreviouslycutsurface．Chattermaterials，suchaslab—on—chips．opticsandelectron．mayresultinapoorsurfacefinishandreducetheies．Manycommonmethodsofmanuf

6、acturingminia—longevityofthetool[2]．turecomponentsarebasedonsemi-conductorpro．-Chatterstabilitycanbeexpressedbythestabili—cessingtechniques，wheresiliconmaterialsarephoto—tylobediagrams，whichplottheboundarythatsepa—etchedthroughchemicalanddryprocesses，usuallyratesstableandunstablemachinin

7、gintheformoftheinlargebatchproduction．However，themajorityofaxialdepthofcutlimitversusspindlespeedforathesemethodsareslow．andlimitedtoafewsilicon—specificradialwidthofcutandworkpiece-．toolcombi．basedmaterialsandessentiallyplanargeometries．nations．However，microoperationsreq