半导体集成电路概述.ppt

《半导体集成电路概述.ppt》由会员上传分享，免费在线阅读，更多相关内容在教育资源-天天文库。

1、半导体集成电路IC常用术语园片：硅片芯片(Chip,Die)：6、8：硅（园）片直径：1＝25.4mm6150mm;8200mm;12300mm;亚微米<1m的设计规范深亚微米<=0.5m的设计规范0.5m、0.35m－设计规范（最小特征尺寸）布线层数：金属（掺杂多晶硅）连线的层数。集成度：每个芯片上集成的晶体管数IC工艺常用术语净化级别：Class1,Class10,Class10,000每立方米空气中含灰尘的个数去离子水氧化扩散注入光刻…………….最小线宽变化生产工厂简介PSIFabTwowasco

2、mpletedJanuary2,1996andisa"StateoftheArt"facility.This2,200squarefootfacilitywasconstructedusingallthelatestmaterialsandtechnologies.Inthissetofcleanroomswechangetheair390timesperhour,ifyoudothemathwithULPAfiltrationthisisaClassOnefacility.Wehavehadittestedanditdoesm

3、eetClassOneparameters(withoutanypeopleworkinginit).Sincewearenotmakingmicroprocessorshereandwedon'twanttowear"spacesuits",werunitasaclass10fab.EventhoughitconsistentlyrunswellbelowClassTen.HereintheFabTwoPhotolithographyareaweseeoneofour200mm.35micronI-LineSteppers.t

4、hissteppercanimageandalignboth6&8inchwafers.AnotherviewofoneoftheFabTwoPhotolithographyareas.Hereweseeatechnicianloading300mmwafersintotheSemiTool.Thewafersareina13waferTefloncassetteco-designedbyProcessSpecialtiesandSemiToolin1995.Againthesearetheworld'sfirst300mmwe

5、tprocesscassettes(thatcanbespinrinsedried).AswelookinthiswindowweseetheWorld'sFirsttrue300mmproductionfurnace.Ourdevelopmentanddesignofthistoolbeganin1992,itwasinstalledinDecemberof1995andbecamefullyoperationalinJanuaryof1996.Herewecanseetheloadingof300mmwafersontoth

6、ePaddle.ProcessSpecialtieshasdevelopedtheworld'sfirstproduction300mmNitridesystem!Webeganprocessing300mmLPCVDSiliconNitrideinMayof1997.2,500additionalsquarefeetof"StateoftheArt"ClassOneCleanroomiscurrentlyprocessingwafers!Withincreased300mm&200mmprocessingcapabilitie

7、sincludingmorePVDMetalization,300mmWetprocessing/Cleaningcapabilitiesandfullwafer300mm.35umPhotolithography,allinaClassOneenviroment.CurrentlyourPS300AandPS300Bdiffusiontoolsarecapableofrunningboth200mm&300mmwafers.Wecanevenprocessthetwosizesinthesamefurnaceloadwitho

8、utsufferinganyuniformityproblems!(ThermalOxideOnly)AccuracyinmetrologyisneveranissueatProcessSpecialties.Weusethemostadvancedroboti