欢迎来到天天文库
浏览记录
ID:19573335
大小:2.23 MB
页数:39页
时间:2018-10-03
《半导体集成电路概述》由会员上传分享,免费在线阅读,更多相关内容在教育资源-天天文库。
1、半导体集成电路IC常用术语园片:硅片芯片(Chip,Die):6、8:硅(园)片直径:1=25.4mm6150mm;8200mm;12300mm;亚微米<1m的设计规范深亚微米<=0.5m的设计规范0.5m、0.35m-设计规范(最小特征尺寸)布线层数:金属(掺杂多晶硅)连线的层数。集成度:每个芯片上集成的晶体管数IC工艺常用术语净化级别:Class1,Class10,Class10,000每立方米空气中含灰尘的个数去离子水氧化扩散注入光刻…………….最小线宽变化生产工厂简
2、介PSIFabTwowascompletedJanuary2,1996andisa"StateoftheArt"facility.This2,200squarefootfacilitywasconstructedusingallthelatestmaterialsandtechnologies.Inthissetofcleanroomswechangetheair390timesperhour,ifyoudothemathwithULPAfiltrationthisisaClassOnefacili
3、ty.WehavehadittestedanditdoesmeetClassOneparameters(withoutanypeopleworkinginit).Sincewearenotmakingmicroprocessorshereandwedon'twanttowear"spacesuits",werunitasaclass10fab.EventhoughitconsistentlyrunswellbelowClassTen.HereintheFabTwoPhotolithographyar
4、eaweseeoneofour200mm.35micronI-LineSteppers.thissteppercanimageandalignboth6&8inchwafers.AnotherviewofoneoftheFabTwoPhotolithographyareas.Hereweseeatechnicianloading300mmwafersintotheSemiTool.Thewafersareina13waferTefloncassetteco-designedbyProcessSpec
5、ialtiesandSemiToolin1995.Againthesearetheworld'sfirst300mmwetprocesscassettes(thatcanbespinrinsedried).AswelookinthiswindowweseetheWorld'sFirsttrue300mmproductionfurnace.Ourdevelopmentanddesignofthistoolbeganin1992,itwasinstalledinDecemberof1995andbeca
6、mefullyoperationalinJanuaryof1996.Herewecanseetheloadingof300mmwafersontothePaddle.ProcessSpecialtieshasdevelopedtheworld'sfirstproduction300mmNitridesystem!Webeganprocessing300mmLPCVDSiliconNitrideinMayof1997.2,500additionalsquarefeetof"StateoftheArt"
7、ClassOneCleanroomiscurrentlyprocessingwafers!Withincreased300mm&200mmprocessingcapabilitiesincludingmorePVDMetalization,300mmWetprocessing/Cleaningcapabilitiesandfullwafer300mm.35umPhotolithography,allinaClassOneenviroment.CurrentlyourPS300AandPS300Bdi
8、ffusiontoolsarecapableofrunningboth200mm&300mmwafers.Wecanevenprocessthetwosizesinthesamefurnaceloadwithoutsufferinganyuniformityproblems!(ThermalOxideOnly)AccuracyinmetrologyisneveranissueatProcessSpecialties.Weusethemostadvancedroboti
此文档下载收益归作者所有