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1、MeasurementScienceandTechnologyPAPER•OPENACCESSRelatedcontent-RobustevaluationofstatisticalsurfaceComparisonofopticalmethodsforsurfacetopographyparametersusingfocus-variationmicroscopyroughnesscharacterizationENGrossman,MGouldandNPMujica-Schwann-Advancedme
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4、chforthecalibrationandtraceabilityoftheangleresolvedscatteringlightsensorJörgSeewigetalThiscontentwasdownloadedfromIPaddress117.165.42.169on20/08/2018at14:44IOPmeasurementscienceandtechnologyMeasurementScienceandTechnologymeas.sci.technol.Meas.Sci.Technol.
5、26(2015)085208(10pp)doi:10.1088/0957-0233/26/8/08520826Comparisonofopticalmethodsforsurface2015roughnesscharacterization©2015IOPPublishingLtdNikolaj A Feidenhans’l1,2,Poul-Erik Hansen1,Lukáš Pilný3,Morten H Madsen1,Giuliano Bissacco3,Jan C Petersen1andmstR
6、afael Taboryski21DanishFundamentalMetrologyA/S,Matematiktorvet307,Kgs.Lyngby,Denmark0852082DTUNanotech,TechnicalUniversityofDenmark,Kgs.Lyngby,Denmark3DTUMEK,TechnicalUniversityofDenmark,Kgs.Lyngby,DenmarkE-mail:jcp@dfm.dkandrata@nanotech.dtu.dkNAFeidenhan
7、s’letalReceived8April2015,revised8May2015Acceptedforpublication22May2015Published16July2015PrintedintheUKAbstractWereportastudyofthecorrelationbetweenthreeopticalmethodsforcharacterizingsurfacemstroughness:alaboratoryscatterometermeasuringthebi-directional
8、reflectiondistributionfunction(BRDFinstrument),asimplecommercialscatterometer(rBRDFinstrument),10.1088/0957-0233/26/8/085208andaconfocalopticalprofiler.Foreachinstrument,theeffectiverangeofspatialsurfacewavel
