JJG661-2004平面等倾干涉仪.pdf

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1、中华人民共和国国家计量检定规程JJG661-2004平面等倾干涉仪FlatnessInterferometerwithIsoclinicCircleFringe2004一09一21发布2005一03一21实施国家质量监督检验检疫总局发布JJG661-2004飞.平面等倾干涉仪检定规程‘。户，;JJG661-2004.VerificationRegulationofFlatness{代替JJG661-1990{、.‘，二，_，__.o.‘，.o.‘，.o.‘，.o.o.。护InterferometerwithIsoclinicCircleFringe本规程经国家质量监督检验检疫

2、总局于2004年09月21日批准，并自2005年03月21日施行。归口单位:全国几何量工程参量计量技术委员会起草单位:中国测试技术研究院本规程委托全国几何量工程参量计量技术委员会负责解释JdG661-2004本规程起草人:冉庆(中国测试技术研究院)陈永康(中国测试技术研究院)张成梯(中国测试技术研究院)曹箭‘中国测试技术研究院)JJG661-2004目录1范围··························································································⋯⋯(1)2引用文献··········

3、··········································································⋯⋯(1)3概述··························································································⋯⋯(1)4计量性能要求·······················。······················································⋯⋯(1)4.1测微目镜的示值误差极差及回程误差·····

4、········································⋯⋯(1)4.2工作台移动的直线度·····························。。···································⋯⋯(2)4.3工作台移动的示值误差及回程误差················································⋯⋯(2)4.4钢球支架的工作性能··································································⋯⋯(2)4.5标准干涉环直

5、径测量的标准偏差···················································⋯⋯(2)4.6干涉环小数干涉级测量的重复性···················································⋯⋯(2)5通用技术要求··············································································⋯⋯(3)5.1外观···························································

6、····························⋯⋯(3)5.2各部分相互作用······。····。····························································⋯⋯(3)6计量器具控制··········································································。···⋯⋯(3)6.1检定条件·.........................................................................

7、.............(3)6.2检定项目·················································································⋯⋯(4)6.3检定方法·················································································⋯⋯(4)6.4检定结果的处理·.........................................