JJF1100-2003平面等厚干涉仪校准规范.pdf

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1、中华人民共和国国家计量技术规范JJF1100-2003平面等厚干涉仪校准规范CalibrationSpecificationforFlatEqualThicknessInterferometers2003一05一12发布2003一11一12实施国家质量监督检验检疫总局发布JJF1100-1003平面等厚干涉仪校准规范产。.O.口.O.O.O.O.0.O.O.O.O.O.。一JJF1100-2003CalibrationSpecificationfor代替JJG336-1983飞.0.o.o.o.o.0.o.o.o.o.o.o.o.o.办FlatEqualT

2、hicknessInterferometers本规范经国家质量监督检验检疫总局于2003年05月12日批准，并自2003年11月12日起施行。归口单位:全国几何量工程参量计量技术委员会负责起草单位:中国测试技术研究院本规范由归口单位负责解释JJF1100-2003本规范主要起草人:冉庆(中国测试技术研究院)陈永康(中国测试技术研究院)参加起草人:李建民(中国测试技术研究院)曹箭(中国测试技术研究院)刀F1100-2003目录1范围································································

3、··························⋯⋯(1)2引用文献····················································································⋯⋯(1)3概述··························································································⋯⋯(1)4计量特性·····················································

4、·······························⋯⋯(1)4.1干涉条纹间距测量的重复性·························································⋯⋯(1)4.2测微目镜的示值误差··································································⋯⋯(1)4.3物镜系统引起的条纹弯曲量·························································⋯⋯(1)4.4仪器的示值

5、误差········································································⋯⋯(2)5校准条件····················································································⋯⋯(3)5.1环境条件·················································································⋯⋯(3)5.2校准用标准器及相应设备·

6、.........................................:.......................(4)6校准项目和校准方法·····································································⋯⋯(4)6.1干涉条纹间距测量的重复性·························································⋯⋯(4)6.2测微目镜的示值误差······。·································

7、··························⋯⋯(4)6.3物镜系统引起的条纹弯曲量·························································⋯⋯(4)6.4仪器的示值误差········································································⋯⋯(5)7校准结果表达··············································································⋯

8、⋯(5)8复校时间间隔······················