台积电六厂讲义能源管理

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1、台積六廠節能措施簡介Fab-6Fab-14台積六廠節能措施簡介六廠介紹………………….1~3節約能源措施建廠設計階段………..4~22生產運轉階段……….23~2990年度節能計劃…….30~31參觀路線圖……………..32六廠介紹BuildingTotalFloorSpace:162,237m2TotalCleanRoomSpace:17,648m2TechnologyCapability:0.25/0.18/0.15/0.13mmMaximumCapacity:≧60,000/month(8

2、”)CUP14/15CUP6WarehouseCUP17CUP16CentralSupportFab-16300mmFab-17300mmCentralSupportFab-14300mmFab-15300mmCUP18Fab-18300mmFab-6OfficeOfficeR&DAdmnDormitoryFab-15300mmBulkGasYard1Fab-6ProfileFab-6isthefirstofthesixfabsTSMCplanstoestablishintheTainanSci

3、enceIndustrialPark(TSIP).Fab-6brokegroundinJuly1997andstartedproductioninJanuary2000.Capacity50,000pcsof8-inchwaferand4,500pcsof12-inchwaferpermonthTechnologyAdvancedCMOStechnologyrangingfrom0.25µmdownto0.10µm.Featuringstate-of-the-artmanufacturingca

4、pabilitiesofall-scannerlithography,shallowtrenchisolation,Titanium/CobaltSalicide,chemicalmechanicalpolishing,low-kdielectrics,andcopperinterconnect.ProductMixDigitallogicproducts,mixed-signallogicproducts,standardandembeddedmemoryproducts.CleanRoomM

5、ini-environment:Class0.1Ballroom:Class1002KeyMilestones07/‘97Fab-6Ground-BreakingCeremonyThefirstfabinTainanScience-basedIndustrialPark09/’97PillingStartMorethanthreethousandsofRCpilesweredrilledintoground25meterdeeptoreachbedrock.02/’98ErectionofSte

6、elStructure10/’99ProcessToolsMoveInThemostadvanced0.25~0.10micronsemiconductortechnology12/’99SuccessfulPilotof0.25and0.22µmProducts01/’00ProductionStart06/’00AchievedtheFirst10KWafersOutput07/’00Release0.18umtoFullProduction12/’00Achieved30KWafersOu

7、tput3節約能源措施建廠設計階段1.儲冰式空調系統2.冰水主機熱回收系統3.5ºC及9ºC之雙冰水溫度系統4.潔淨室採mini-environment節能設計5.空調系統,排氣系統及製程用水系統,皆使用變頻空制器6.水資源回收7.辦公室及停車場空調節能改善生產運轉階段1.製程用冷卻水(pcw)減量2.潔淨室調整正壓及風速設定節能改善3.製程排氣減量4.降低冷卻水塔散熱風扇的負載5.照明減量節能改善90年度節能計劃1.增加一台酸性洗滌塔，降低整座風管系統壓損節省電能2.高階製程廢水AOR/AWR

8、回收3.晶片乾燥槽廢水MaragoniDryer回收4.化學機械研磨廢水回收CMPrecovery4.措施:利用離峰電價優惠時段來儲冰;利用尖峰用電時段來溶冰,進而製造出所需之冰水.配合國家之能源政策,有效移轉尖峰電力負載,進而降低契約容量..效益:可減少尖峰用電量2,407,014kwh/年依台電夏月及非夏月之離峰與尖峰電價差計算,可省3,606,955元/年1.儲冰式空調系統建廠設計階段5儲冰桶(液態)儲冰桶(固態)儲冰桶(固態)儲冰桶(液態)25%乙烯乙二醇出水溫-3.9℃冰水