SEMI F54-1000 TEST METHOD FOR MEASURING THE COUNTING EFFICIENCY

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1、SEMIF54-1000TESTMETHODFORMEASURINGTHECOUNTINGEFFICIENCYOFCONDENSATIONNUCLEUSCOUNTERSThistestmethodwastechnicallyapprovedbytheGlobalFacilitiesCommitteeandisthedirectresponsibilityoftheNorthAmericanFacilitiesCommittee.CurrenteditionapprovedbytheNorthAmericanRegionalStandardsCommittee

2、onJuly13,2000.InitiallyavailableonSEMIOnLineAugust2000;tobepublishedOctober2000.PreviouslypublishedJune2000.ASTMF328—StandardPracticeforCalibrationofan1PurposeAirborneParticleCounterUsingMonodisperse1.1ParticlespecificationsforgasesrequiretheuseofSphericalParticlescondensationnucle

3、uscounters(CNCs)havingspecified24.2JISstandardcountingefficiencies.ThisdocumentprovidesthetestmethodfordeterminingthecountingefficienciesofJISB9921—JapaneseIndustrialStandard,LightCNCs.ScatteringAutomaticParticleCounterNOTE2:Aslistedorrevised,alldocumentscitedshallbethe2Scopelatest

4、publicationsofadoptedstandards.2.1Thisdocumentprovidesthemethodfor1)generatinganaerosolstandardconsistingofsodium5Terminologychloride(NaCl)particleshavingsizes0.01micrometer5.1aerosolelectrometer—aninstrumentthatandlargersuspendedinairatatmosphericpressure(1×convertsthechargeflowin

5、anaerosolstreamtoan510Pa),2)controllingthesizeandconcentrationofelectricalcurrentsignal.particlesintheaerosol,and3)usingtheaerosoltodeterminethecountingefficiencyofaCNCasa5.2aerosolstandard—anaerosolcontainingparticlesfunctionofparticlesize.Thismethodissuitableforofaknownsizeandcon

6、centration.CNCshavingalowersizesensitivityof0.015.3coincidenceerror—theinaccuracyinameasuredmicrometerorlarger.particleconcentrationcausedbymultipleparticlesinNOTE1:Suitabletestmethodsforcalibratingopticalparticletheopticalsensingvolumeofaninstrument.countersarecontainedinASTMF328a

7、ndJISB9921.5.4concentrationlimit—themaximumconcentration2.2Thisstandarddoesnotpurporttoaddresssafetyofparticlesinanaerosoltoavoidacoincidenceerrorofissues,ifany,associatedwithitsuse.Itisthe10%orgreaterinaninstrument.responsibilityoftheusersofthisstandardtoestablish5.5countingeffici

8、ency—theratiooftheappropri