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1、SEMID13-95N/A©SEMI1995,1996TERMSANDDEFINITIONSFORFPDCOLORFILTERASSEMBLIES1Purpose5ColorFilterElements(seeFigure1)ThesetermsanddeÞnitionsdescribevariouselements5.1glasssubstrateÑThebasematerialontowhichandcharacteristicsofFPDcolorÞlter(CF)assemblies.blackmatrixandcolorfiltermaterialsaredeposited
2、.TheyareintendedtoassistinfutureCFstandardiza-AlsocalledtheFrontPlate.AfterassemblyintoaDis-tionactivity.play,itsbacksurfacefacestheobserver.SeeSEMID3,SEMID4,andDefinitionsforFPDSubstratesfor2Scopeparameters,definitionsanddimensionalspecifications.ColorÞlterscomprisethefrontplateassemblyinacol-
3、5.2blackmatrix(BM)ÑMaterialwhichblockslightoredßatpaneldisplay.Theyconsistofanumberoftransmission.Itprovidesaboundarybetweencolorfil-materiallayerssuchasglasssubstrate,colorÞlterterpixels,preventingthetransmittinglightbetweenmaterial,blackmatrixmaterial,overcoatlayer,andadjacentpixels.IndiumTin
4、Oxide(ITO)Þlms.Eachoftheselayershas5.3colorÞltermaterialÑColoredmaterialthroughvariouspropertieswhichmayneedtobespeciÞed,whichlightistransmitted.Itisdepositedinthreecol-produced,controlled,andcharacterized.Thisdocu-orsÑred,green,andblueÑwhicharepatternedtomentprovidesanoverviewoftheselayers,wit
5、htermsproduceanarrayofcontiguous,rectangular,orsquare-anddeÞnitionsforselectedelements,andindicatestheshapedpixels.appearanceofsomecolorÞlterdefects.ThisdocumentmaybeusefulindevelopingmaterialspeciÞcations,5.4overcoatlayerÑTransparentmaterialdepositedinspectioncriteria,andtestmethods.overthecol
6、orfiltermaterial.ThisprovidesasmoothsurfaceandenoughadhesionforsubsequentITOmate-3Limitationsrialdeposition.Thisdocumentdoesnotcontaindetailedmeasuring5.5ITOFilmÑAthinfilmofIndiumTinOxide.andtestmethods.Suchmethodsmaybedevelopedseparately,andreferencestothemmaybeincorporated6ColorFilterPixel(RG
7、B)LayoutintocolorÞlterspeciÞcationdocumentswhereappro-6.1ThecolorÞlterpixelsarearrangedinoneofsev-priate.TheassemblyofcolorÞltersintoaßatpaneleralarraypatterns.Thearrayisconstructedfrommdisplayassemblyisnotcoveredherein.verticalco
