color filter introduction

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1、ColorFilter簡介ScanLineDataLineTFTPolarizerCFPolarizerPCBLightGuideLampLCcellTFT-LCDStructure黑色矩陣製程(BMpatterningprocess)Unpacker&Initialcleaner鉻膜濺鍍鉻玻璃清洗正光阻塗佈(1)素玻璃投入1.CrsputteringCr正光阻塗佈(2)CrsputterCrglassPre-cleanerSlitcoaterSpincoater2.BMphotoline鉻玻璃CrNyCrOxSubstrate蝕刻去光阻紫外線曝光顯影烘烤去掉邊

2、緣光阻EBR(EdgeBeadRinse)AlignerDeveloperHotplate3.EtchinglineEtchingStrippingBMpatternglass真空乾燥VacuumDryer預烘烤與冷卻Pre-bake&CoolplateCF製程檢查項目黑色矩陣製程(BMpatterningprocess)BMPHOTO&EtchingLINE顯影後缺陷檢查ADI(AfterDeveloperInspection)巨觀檢查(Macroreview)123蝕刻後缺陷檢查AEI(AfterEtcherInspection)紅色光阻塗佈(1)紅色光阻塗

3、佈(2)Pre-cleanerSlitcoaterSpincoaterBMpatternglass清洗紫外線曝光顯影去掉邊緣光阻EBR(EdgeBeadRinse)烘烤Oven真空乾燥預烘烤與冷卻Pre-bake&CoolplateRGB製程(RGBprocess)1.RLine綠色光阻塗佈(1)綠色光阻塗佈(2)Pre-cleanerSlitcoaterSpincoaterRglass清洗紫外線曝光顯影去掉邊緣光阻EBR(EdgeBeadRinse)烘烤2.GLine真空乾燥VacuumDryer預烘烤與冷卻Pre-bake&Coolplate藍色光阻塗佈(1

4、)藍色光阻塗佈(2)Pre-cleanerSlitcoaterSpincoaterR,Gglass清洗紫外線曝光顯影去掉邊緣光阻EBR(EdgeBeadRinse)Developer烘烤Oven真空乾燥VacuumDryer預烘烤與冷卻Pre-bake&Coolplate3.BLineRGB製程(RGBprocess)CF製程檢查項目121.PixelCD2.Overlay3.厚度4.色度量測3ITO製程(ITOsputteringprocess)ITOpre-cleaner氧化銦錫膜濺鍍R,G,B璃投入ITO玻璃ITOsputterITOglassRepa

5、irDefectInspectionUVasher缺陷檢查機紫外線灰化修補3.ITO製程(ITOSputteringprocess)CF製程檢查項目1.色度量測2.Rs值量測MVA製程(Multi-domainVerticalAlignment)正光阻塗佈(1)正光阻塗佈(2)Pre-cleanerSlitcoaterSpincoaterITOglass清洗紫外線曝光顯影去掉邊緣光阻EBR(EdgeBeadRinse)AlignerDeveloper烘烤Oven4.SLine真空乾燥VacuumDryerPre-bake&Coolplate預烘烤與冷卻最終檢查(

6、Finalinspection)Macroinspection巨觀檢查AOIPre-cleaner光學檢查前清洗AOI(Auto-OptoInspection)光學檢查Microreview微觀檢查Judgement&Sorting判定與品質分類出貨Shipping非MVA產品MVA產品