Foundations of DC plasma sources直流等离子体源基础

Foundations of DC plasma sources直流等离子体源基础

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时间:2019-08-08

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1、PlasmaSourcesScienceandTechnologyTOPICALREVIEWRelatedcontent-Foundationsoflow-temperatureplasmaFoundationsofDCplasmasourcesphysics—anintroductionAvonKeudellandVSchulz-vonderGathenTocitethisarticle:JonTomasGudmundssonandAnteHecimovic2017PlasmaSourcesSci.-Low-pressuregasdischargemodellingTechnol.2612

2、3001GGLister-GlowdischargeswithelectrostaticconfinementoffastelectronsVIKolobovandASMetelViewthearticleonlineforupdatesandenhancements.Recentcitations-Paschen'scurveinmicrogapswithanelectrodesurfaceprotrusionYangyangFuetal-Gasbreakdowninatmosphericpressuremicrogapswithasurfaceprotrusiononthecathode

3、YangyangFuetal-GrowthofWall-controlledMWCNTsbyMagneticFieldAssistedArcDischargePlasmaM.S.RoslanetalThiscontentwasdownloadedfromIPaddress61.174.131.57on12/08/2018at10:16PlasmaSourcesScienceandTechnologyPlasmaSourcesSci.Technol.26(2017)123001(20pp)https://doi.org/10.1088/1361-6595/aa940dTopicalReview

4、FoundationsofDCplasmasources1,23,4JonTomasGudmundssonandAnteHecimovic1ScienceInstitute,UniversityofIceland,Dunhaga3,IS-107Reykjavik,Iceland2DepartmentofSpaceandPlasmaPhysics,SchoolofElectricalEngineering,KTH–RoyalInstituteofTechnology,SE-10044,Stockholm,Sweden3InstituteforExperimentalPhysicsII,Ruhr

5、-UniversityBochum,D-44801Bochum,Germany4Max-Planck-InstitutforPlasmaPhysics,Boltzmannstraße2,D-85748Garching,GermanyE-mail:tumi@hi.isReceived1March2017,revised25August2017Acceptedforpublication17October2017Published8November2017AbstractAtypicaldcdischargeisconfiguredwiththenegativecathodeatoneendand

6、apositiveanodeattheotherend,separatedbyagasfilledgap,placedinsidealongglasscylinder.Afewhundredvoltsbetweenthecathodeandanodeisrequiredtomaintainthedischarge.Thetypeofdischargethatisformedbetweenthetwoelectrodesdependsuponthepressureoftheworkinggas,thenatureoftheworkinggas,theappliedvoltageandthegeo

7、metryofthedischarge.Wediscussthecurrent–voltagecharacteristicsofthedischargeaswellasthedistinctstructurethatdevelopsintheglowdischargeregion.ThedcglowdischargeappearsinthedischargecurrentrangefromμAtomAat0.

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