Temperature dependent optical constants for SiO2SiO2的温度相关光学常数 Si衬底上的椭偏薄膜

Temperature dependent optical constants for SiO2SiO2的温度相关光学常数 Si衬底上的椭偏薄膜

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时间:2019-08-08

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1、MaterialsResearchExpressPAPER•OPENACCESSRelatedcontent-Characterizationofthin-filmthicknessTemperaturedependentopticalconstantsforSiO2SaraPourjamal,HenrikMäntynen,PriitJaansonetal.filmonSisubstratebyellipsometry-Characterizationofsilicaxerogelfilmsbyvariable-anglesp

2、ectroscopicellipsometryandinfraredspectroscopyTocitethisarticle:JunboGongetal2017Mater.Res.Express4085005CHimcinschi,MFriedrich,CMurrayetal.-EvolutionofopticalconstantsofsilicondioxideonsiliconfromultrathinfilmstothickfilmsQing-YuanCai,Yu-XiangZheng,Peng-Viewthearti

3、cleonlineforupdatesandenhancements.HuiMaoetal.Recentcitations-TitaniumnitridenanoparticlesasanalternativeplatformforplasmonicwaveguidesinthevisibleandtelecommunicationwavelengthrangesV.I.ZakomirnyietalThiscontentwasdownloadedfromIPaddress183.158.90.254on06/08/2018at

4、11:32IOPMaterialsResearchExpressMater.Res.Express4(2017)085005https://doi.org/10.1088/2053-1591/aa7d17Mater.Res.Express4OPENACCESSPAPER2017TemperaturedependentopticalconstantsforSiO2film©2017IOPPublishingLtdonSisubstratebyellipsometryRECEIVED17March2017MRXREVISEDJun

5、boGong1,RuchenDai2,ZhongpingWang2,ChuanchaoZhang3,XiaodongYuan3andZengmingZhang2,412June20171DepartmentofPhysics,UniversityofScienceandTechnologyofChina,Hefei,Anhui230026,People’sRepublicofChinaACCEPTEDFORPUBLICATION2TheCentreofPhysicalExperiments,UniversityofScienc

6、eandTechnologyofChina,Hefei,Anhui230026,People’sRepublicofChina0850053July20173ResearchCenterofLaserFusion,ChinaAcademyofEngineeringPhysics,Mianyang,Sichuan621900,People’sRepublicofChinaPUBLISHED4KeyLaboratoryofStrongly-CoupledQuantumMatterPhysics,ChineseAcademyofSc

7、iences,SchoolofPhysicalSciences,2August2017UniversityofScienceandTechnologyofChina,Hefei,Anhui230026,People’sRepublicofChinaJGongetalE-mail:zzm@ustc.edu.cnOriginalcontentfromthisworkmaybeusedKeywords:SiO2,opticalconstants,temperature,refractiveindex,ellipsometryunde

8、rthetermsoftheCreativeCommonsSupplementarymaterialforthisarticleisavailableonlineAttribution3.0licence.Anyfurtherdistributionofthisworkmus

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