资源描述:
《Temperature dependent optical constants for SiO2SiO2的温度相关光学常数 Si衬底上的椭偏薄膜》由会员上传分享,免费在线阅读,更多相关内容在学术论文-天天文库。
1、MaterialsResearchExpressPAPER•OPENACCESSRelatedcontent-Characterizationofthin-filmthicknessTemperaturedependentopticalconstantsforSiO2SaraPourjamal,HenrikMäntynen,PriitJaansonetal.filmonSisubstratebyellipsometry-Characterizationofsilicaxerogelfilmsbyvariable-anglesp
2、ectroscopicellipsometryandinfraredspectroscopyTocitethisarticle:JunboGongetal2017Mater.Res.Express4085005CHimcinschi,MFriedrich,CMurrayetal.-EvolutionofopticalconstantsofsilicondioxideonsiliconfromultrathinfilmstothickfilmsQing-YuanCai,Yu-XiangZheng,Peng-Viewthearti
3、cleonlineforupdatesandenhancements.HuiMaoetal.Recentcitations-TitaniumnitridenanoparticlesasanalternativeplatformforplasmonicwaveguidesinthevisibleandtelecommunicationwavelengthrangesV.I.ZakomirnyietalThiscontentwasdownloadedfromIPaddress183.158.90.254on06/08/2018at
4、11:32IOPMaterialsResearchExpressMater.Res.Express4(2017)085005https://doi.org/10.1088/2053-1591/aa7d17Mater.Res.Express4OPENACCESSPAPER2017TemperaturedependentopticalconstantsforSiO2film©2017IOPPublishingLtdonSisubstratebyellipsometryRECEIVED17March2017MRXREVISEDJun
5、boGong1,RuchenDai2,ZhongpingWang2,ChuanchaoZhang3,XiaodongYuan3andZengmingZhang2,412June20171DepartmentofPhysics,UniversityofScienceandTechnologyofChina,Hefei,Anhui230026,People’sRepublicofChinaACCEPTEDFORPUBLICATION2TheCentreofPhysicalExperiments,UniversityofScienc
6、eandTechnologyofChina,Hefei,Anhui230026,People’sRepublicofChina0850053July20173ResearchCenterofLaserFusion,ChinaAcademyofEngineeringPhysics,Mianyang,Sichuan621900,People’sRepublicofChinaPUBLISHED4KeyLaboratoryofStrongly-CoupledQuantumMatterPhysics,ChineseAcademyofSc
7、iences,SchoolofPhysicalSciences,2August2017UniversityofScienceandTechnologyofChina,Hefei,Anhui230026,People’sRepublicofChinaJGongetalE-mail:zzm@ustc.edu.cnOriginalcontentfromthisworkmaybeusedKeywords:SiO2,opticalconstants,temperature,refractiveindex,ellipsometryunde
8、rthetermsoftheCreativeCommonsSupplementarymaterialforthisarticleisavailableonlineAttribution3.0licence.Anyfurtherdistributionofthisworkmus