Training material - CN

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1、MARCHFundamentalsofPlasmaTechnology&Applications议程Agenda•等离子技术简介IntroductiontoPlasmaTechnology•等离子技术在高级封装工业的应用PlasmaApplicationinAdvancedPackagingIndustries•应用于集成电路封装的March产品MARCHProductsForICPackaging等离子技术简介IntroductiontoPlasmaTechnology什么是等离子体WhatisaPlasma?FourthStateofMatter什么是等离子体WhatisaPlasma?

2、SolidLiquidGasPlasmaEnergyEnergyEnergy等离子体的组成ComponentsofaPlasma等离子体的组成ComponentsofaPlasma•电子Electrons•离子Ions–Positive•Ar+e-Ar++2e-–Negative•Cl+2e-2Cl-2•自由基FreeRadicals:–CH+e-.CH+.H+e-43•光子Photons–Ar+e-Ar*+e-Ar+e-+hn•中性粒子Neutrals表面反应机理:物理反应SurfaceReactionMechanisms:Physical•Physical物理反应ArgonPlas

3、maPhysicalProcess–Sputtering-ArgonPlasma溅射反应Sputtering–SubstratePlacedon(-)Electrode基板放置在负极++Ar+–ArIonAttractedto(-)Electrode氩离子被负极吸引Ar–ImpactForceRemovesContamination撞击力去除污染物•Advantages优势–Non-ChemicalReaction:NoOxidation无化学反应：无氧化–PureSubstrateRemaining纯基板残留Pad•Disadvantages-EasytoMinimize缺点–容易避免Su

4、bstrate–SubstrateDamage:Impact,andOverheating基板损坏：–PoorSelectivity无选择性–LowEtchRate低蚀刻率–ContaminantRedeposition污染物再次沉淀表面反应机理:化学反应SurfaceReactionMechanisms:Chemical•PlasmaGeneratedReactiveChemicalSpecies等离子产生活性化学离子–SourceChemicalsInclude:化学气源包括H2,O2andCF4–IonizedSourceChemicalProducesReactiveSpecies气

5、源离子化产生活性粒子–GasPhaseProductsProducedFromReactionswithSubstrateSurface与基板表面反应后产生气相产物•Advantages优点–HighCleaningSpeed高清洗速度–HighSelectivity高选择性–EffectiveforOrganicContaminants对有机物污染物非常有效•Disadvantages-OxidesCanBeProduced缺点–可能产生氧化HydrogenPlasmaChemicalandChemicalProcessPhysicalProcessOxideRemoval+++ArArH

6、.O.H..OOCHHHOO等离子体的产生GeneratingaPlasma等离子体的电子和离子特性PlasmaElectronandIonProperties•离子密度IonDensity–NumberofIonsperUnitVolume单位体积内离子的数量–HigherIonDensity=HigherNumberofReactiveSpecies更高的离子浓度=更多的活性粒子数量–HighNumberofActiveSpecies=IncreasedSpeed,andUniformity更多的活性粒子数量=提高反应速度和均匀性–RequiresEfficientCouplingofP

7、ower需要有效的电源匹配等离子体的电子和离子特性PlasmaElectronandIonProperties•离子能量IonEnergy–EnergyofIonToDoWork=Sputtering离子需要能量来做功=溅射反应–Sputtering溅射反应•ChargedSpeciesCollidesWithSurface带电粒子与表面发生碰撞•EnergySufficientToBreakBonds足够的