Issues facing Industry Sherer

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1、SEMICONDUCTORINDUSTRYEHSAGENDAAGENDA
CURRENT&FUTUREISSUES
POINT-OF-USE(POU)DEVICEINFORMATION
EXPECTATIONSFORPOUDEVICESUPPLIERSMaterialsLifecycleSolutionsPFC’S(GLOBALWARMING)PFC’S(GLOBALWARMING)INAPRIL,1999,THEWORLDSEMICONDUCTORCOUNCIL(WSC)REACHEDAGREEMENTTOREDUCEAGGREGATEABSOLUTEEMISSION

2、SOFPFCsFROMSEMICONDUCTORFABRICATIONFACILITIESBY10%ORGREATERBY2010.THEBASELINEYEARIS1995FOREUROPEANUNION,JAPAN,ANDUNITEDSTATES;1997FORSOUTHKOREA;AND1998FORTAIWAN(JOINEDINYEAR2000).THISAGREEMENTALSOPROVIDESUNIFORMGUIDANCETORESEARCHERSANDEQUIPMENTSUPPLIERS.MaterialsLifecycleSolutionsPERFLUO

3、ROCOMPOUNDS(PFC)PERFLUOROCOMPOUNDS(PFC)
SULFURHEXAFLUORIDE(SF6)
NITROGENTRIFLUORIDE(NF3)
TETRAFLUOROMETHANE(CF4)
TRIFLUOROMETHANE(CHF3)
HEXAFLUOROETHANE(C2F6)
OCTAFLUOROPROPANE(C3F8)MaterialsLifecycleSolutionsDEVELOPMENTSFORCVDDEVELOPMENTSFORCVD
PROCESSOPTIMIZATION:
CLEANINGOFCVDCHAMBERS

4、WITHC2F6WASOPTIMIZEDTOREDUCETHEAMOUNTOFC2F6USED(EXAMPLE:END-POINTDETECTORS).
CHANGESINPROCESSVARIABLES(ie:PFCFLOWS,PRESSUREANDPLASMAPOWER)MaterialsLifecycleSolutionsDEVELOPMENTSFORCVDDEVELOPMENTSFORCVD
ALTERNATIVECHEMISTRIES:
NF3HASBEENUSEDASAREPLACEMENTINAFEWINSTANCES.UTILIZATIONEFFICIE

5、NCYISHIGHERFORNF3THANC2F6
C3F8ISUSEDASAREPLACEMENTFORC2F6,WITHTHEMMTCEEMISSIONSBEINGREDUCED.UTILIZATIONEFFICIENCYISHIGHERFORC3F8THANC2F6
SOMEFACILITIESSWITCHEDTOClF3MaterialsLifecycleSolutionsDEVELOPMENTSFORCVD
PROCESSHARDWARECHANGE:
NF3MICROWAVECLEANS.NF3ISBROKENDOWNINAPRE-CHAMBERPLASMA

6、DEVICETOGENERATEFLUORINETOCLEANCHAMBER.MaterialsLifecycleSolutionsDEVELOPMENTSFORDRYETCHDEVELOPMENTSFORDRYETCH
SINCETHEPFCsACTUALLYCONTACTWAFERS,PROCESSOPTIMIZATIONANDALTERNATIVECHEMISTRIESAREMORESENSITIVE.CHANGESINPROCESSVARIABLES(I.E.PFCFLOWS,PRESSUREANDPLASMAPOWER)CANBEDONETOREDUCEEMI

7、SSIONS.MaterialsLifecycleSolutionsPFCRECOVERY/RECYCLEPFCRECOVERY/RECYCLECENTRALIZEDCAPTURE/RECOVERYSYSTEMSHAVEBEENSHOWNTORECOVERC2F6,CHF3ANDSF6VERYEFFICIENTLY(>95%);HOWEVER,CF4CAPTUREISABOUT75%.THECOSTEFFECTIVENESSOFTHISTECHNOLOGYISSTILLUNKNOWN.MANYOFTHERECOVERY/RECYCLEEF