资源描述：
《Tunable ir detector with integrated micromachined Farby-Perot filter》由会员上传分享，免费在线阅读，更多相关内容在学术论文-天天文库。
1、J.Micro/Nanolith.MEMSMOEMS72,021004AprÐJun2008TunableinfrareddetectorwithintegratedmicromachinedFabry-PerotfilterNorbertNeumannAbstract.Wereportthedesign,fabrication,andtestresultsofatunableMartinEbermannpyroelectricdetectorwithanintegratedmicromachi
2、nedFabry-PerotFPInfraTecGmbHÞlterforgasanalysisinthemid-waveinfraredMWIR.Thenewap-GostritzerStrasse61-63proachisbasedonabulkmicromachinedFabry-Perotinterferometer01217Dresden,Germanywithanaircavity,whichiselectrostaticallytuned.Varioustypesofmov-E-m
3、ail:n.neumann@infratec.deablereßectorsandspringconÞgurationsarefabricatedtodeterminetheoptimumsolutionwithrespecttomaximumtuningrange,lowgravityin-ßuenceoncenterwavelength,andsuitableÞlterbandwidth.ShortandSteffenKurthlongcavityÞltersaredesignedforthesp
4、ectralrangesof3to4.3mandFraunhoferInstituteforReliabilityand3.7to5.0m,respectively.ThetunableÞlterisarrangedontopofaMicrointegrationcurrentmodepyroelectricdetectorwithaßatspectralresponse.ItisDepartmentMultiDeviceIntegrationshownthatthemainchallengeis
5、toachieveahighÞnesseinspiteofReichenhainerStrasse88nonperfectparallelism,mirrorcurvature,andtheadditionalphaseshift09126Chemnitz,GermanycausedbytheBraggreßectors.©2008SocietyofPhoto-OpticalInstrumentationEngineers.DOI:10.1117/1.2909206Subjectterms:Fab
6、ry-PerotÞlter;Þnesse;infraredÞlter;Braggreßector;antire-KarlaHillerßectioncoating;bulkmicromachining.ChemnitzUniversityofTechnologyCenterforMicrotechnologiesPaper07050SSRreceivedJul.17,2007;revisedmanuscriptreceivedSep.26,09107Chemnitz,Germany2007;accep
7、tedforpublicationOct.17,2007;publishedonlineApr.30,2008.ThispaperisarevisionofapaperthatwaspresentedattheSPIEconferenceonMOEMSandMiniaturizedSystemsVI,January2007,SanJose,California.ThepaperpresentedthereappearsunrefereedinSPIEProceedingsVol.6466.1Int
8、roductionfullrange,andnegligibleinßuenceofgravitationandvi-brationareamatterofconcern.OneofthemaindifÞcultiesInfraredIRpyroelectricdetectorsequippedwithnarrow-istofulÞlltheconßictiverequirementsoriginatingfrombandinfraredÞxedwa
