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1、Mechatronics9(1999)657±674Inversekinematicmodelingofacoupled¯exurehingemechanismaaa,JaeW.Ryu,Sung-QLee,Dae-GabGweon*,bKeeS.MoonaDepartmentofMechanicalEngineering,KoreaAdvancedInstituteofScienceandTechnology,373-1Kusong-Dong,Yusong-Gu,Taejon,SouthKoreabDepartmentofMechanicalEngineeringan
2、dEngineeringMechanics,MichiganTechnologicalUniversity,Houghton,MI49931,USAReceived12July1997;receivedinrevisedform16December1998;accepted31December1998AbstractAninversekinematicmodelofamicro-motionstagewiththreedegrees-of-freedommotionispresented.TheXYystageusesthreepiezoelectricactuato
3、rsandamonolithic¯exurehingemechanismwhichisdesignedtoprovidelargeymotion.Thestagedesignhasacoupledhingemechanismwhichcausesadicultyinmotioncontrol.Thispaperdescribesacomputerbasedinversekinematicmodelofhingemechanismandtheexperimentalveri®cationforthemodel.Inparticular,itpresentsakinema
4、ticcalibrationprocedureforimprovingtheaccuracyofthemodel.Itisshownthatthesimulationandexperimentalresultsareverysimilartoeachotherandtheyalsodemonstratethattheinversekinematicmodelcanbeusedforopenloopcontrolofthestagewithin5%error.Theopenloopcontrolofthestageprovides7.6and8.2nmpositioni
5、ngresolutionoverthetotalrangeof41.5and47.8mmalongtheX-andY-axis,respectively,and0.057arcsecrotationalresolutionoverthetotalrangeof322.8arcsecaboutthey-axis.#1999PublishedbyElsevierScienceLtd.Allrightsreserved.*Correspondingauthor.Tel.:+82-42-869-3225;fax:+82-42-869-5225.E-mailaddress:dg
6、gweon@cais.kaist.ac.kr(D.G.Gweon)0957-4158/99/$-seefrontmatter#1999PublishedbyElsevierScienceLtd.Allrightsreserved.PII:S0957-4158(99)00006-9658J.W.Ryuetal./Mechatronics9(1999)657±6741.IntroductionThequalityofaprecisionproduct,ingeneral,reliesontheaccuracyandprecisionofitsmanufacturingan
7、dinspectionprocesses.Inmanycases,thelevelofprecisioninthemanufacturingandinspectionprocessesisalsodependentonthepositioningcapabilityofatoolwithrespecttoworkpieceintheprocesses.Recently,thepositioningaccuracylevelemployedforsomeoftheprecisionproductshasreachedthelevelofsub-micr
