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1、MechanicalAmpliferDesignforPiezo-actuatorApplicationswxuandTGKiag1'IntroductionInrecentyears,piezoelectricactuatorshawbecomemorewidelyusedinprecisioninstrumentation,manuiktwhgandmechatronicsareas[1,2U].However,fortheaboveapplications,thereisaproblemthatpiemmaterial
2、scanonlyprovideaverysmallrangeofdisplacementwhichishardlysufiicienttomeettherequirementdirectly.Inordertoovercomethisdisadvantage,amechanicalamplifierisnodyused.Theflexurehingedisplacementamplifierhasnumerousadvantages,suchassmoothnessofmovement,noneedoflubrication
3、andzerobacklash.Inmostcases,therefore,theuseofaflexure-hingedmechanicaldisplacementamplifieristhemostappropriateapproachtomagnifyingtheoutputdisplacementofthepie-actuators.Flexure-hingeddisplacementamplifiersaredivided,forthepurposesofthispaper,intotwogroups;precis
4、ionorientedanddisplacementoriented,accordingtotheirapplication.Threebasictopologiesofflexure-hingedstructureareintroducedwhichprovidetheelementalcomponentsofthemajorityofcompoundamplifiers.Theperformanceofmerentflexurehingeprofilesisstudied,byusingfiniteelementmeth
5、ods,intermsofflexibilityandaccuracy.Finally,asimpleleverdisplacementamplifierisdesignedforpiemmotorsanditsthedynamicperformanceisdiscussed.2TopologiesofFlexureHingedDisplacementAmplifierAvarietyofflexure-hingeddisplacementamplifiertopologieshavebeenappliedindiffere
6、ntareas.Fundamentally,theyarecompoundamplifiertopologieswhichcombinethreebasicampl-elements,simplelever,bridgeandfour-barlinkageamplifiers.Benefitingfromasymmetricalstructure,abridgedisplacementamplifierhasahighergainandlinearoutputmotionwhichcanbeusedforprecisiono
7、rientedapplications.Thefour-barlinkageflexure-hingedamplifiercanprovidesomespecialoutputmovementsforbothprecisionandhighdisplacementorientedapplications.Thesimpleleverflexure-hingeddisplacementamplifierscanproducelargeoutputdisplacementandhasthehighestefficiencybec
8、auseituseslesshingesthantheothertwotopologies.Assumingaright-anglehingeprofile(asshowninfigure1)isused,aPCbaseddesignerprogramhasbeendeveloped[4]