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1、TheparticlebehavioranalysisanddesignintheimprovementofKDPfinishinga,caa,b,caaaa,caC.Wang*,X.Y.Li,F.Ji,Q.L.Wei,Y.F.Zhang,W.Gao,W.Huang,andG.P.TangaInstituteofMachineryManufacturingTechnology,ChinaAcademyofEngineeringPhysics,Mianyang,621900,ChinabDepartmentofOpticsScienceandEngin
2、eering,FudanUniversity,Shanghai,200433,ChinacLaboratoryofPrecisionManufacturingTechnology,ChinaAcademyofEngineeringPhysics,Mianyang,621900,ChinaABSTRACTApolymercoatingwasdesignedandpreparedtomodifythesurfaceofCIPtomatchthehardnessofKDP,anddeliquescenceremovalwasexploredbyadditi
3、onproperwateronline.Theabovetechniquesnotonlyweakenthemechanicalscratchesandincreaseremovalrate,butalsoarebeneficialforsubsequentlycleaning.Removalfunctionexhibitsparticulartransitionalzoneontheedgeoffinishingspotwhichclearlydemonstratestheexistenceofdifferentprocessingmechanis
4、mssimultaneously.ThefigureaccuracyandPSD1ofalarge-apertureKDPareapparentlyconvergedafterMRF.Keywords:KDP,particle,deliquescence,MRF1.INTRODUCTIONKDPisasignificantnonlinearcrystalmaterialaselectro-opticalswitchandfrequencyconverterinhighenergylasersystem[1].Butitisconsideredtobe
5、oneofthemostdifficultmaterialstoprocessduetoitslowhardness,temperaturesensitivity,highbrittleness,andwatersolubility.Today,themostreliablemethodforKDPprecisemanufacturingissingle-pointdiamondturning(SPDT)[2].Thoughhighlysuccessfulofthistechnique,theSPDTtoolgroovescompriseaserie
6、sofsurfaceflawsthatwoulddamagetheoptics’lifeunderhigh-fluencelaserapplication.Researchdemonstratesthatthewavinesserrorsareinducedbyvibration,straightness,andsomeotherambientfactors,whicharehardlytoimproveunderpresenttechnology.Furthermore,thegeneratingsurfaceroughnessviaSPDTisn
7、otaslowasthatofotheropticssuchasfusedsilicaafterfinishing[3].Withtheincreasedrequirementontransmissionenergyoflasersystem,thesurfacequalitydemandsofKDPareaccordinglyelevated.Magnetorheologicalfinishing(MRF)isanovelpolishingtechnologywhichisconsideredtobeexcellent,deterministicp
8、rocessforfinishingopticstohighprecisionandhasbeenwidel
