资源描述：
《Current Trends and Future Directions in MEMS》由会员上传分享，免费在线阅读，更多相关内容在学术论文-天天文库。
1、ExperimentalMechanicsDOI10.1007/s11340-011-9520-1MURRAYLECTURECurrentTrendsandFutureDirectionsinMEMSR.J.PryputniewiczReceived:8June2011/Accepted:9June2011#SocietyforExperimentalMechanics2011AbstractDemandsformicroelectromechanicalsystemsavailableinthefutu
2、re.Thispaperaddressesdevelopmentof(MEMS)(alsoknownasmicrosystemstechnology,orrepresentativeMEMSofcontemporaryinterestandillus-MST)arecontinuouslygrowinganditispredictedthattratestheiruseinapplicationsrelatingtodailylifeaswelltheywillcontinuetogrowfor,atle
3、ast,afewmoredecades.astosomeofthemostchallengingtasksintoday’sForexample,MEMSbasedproductsproducedin2005hadexperimentalmechanics.avalueof$8billion,40%ofwhichwasinsensors.ThebalancewasforproductsthatincludedmicromachinedKeywordsMEMS.Sensors.Experimentalfea
4、tures,suchasinkjetprintheads,catheters,andRFICmicromechanics.Applications.Futureeconomicbenefitchipswithembeddedinductors.Growthprojectionsfollowarapidlyincreasingcurve,withthevalueofproductsrisingto$40billionin2015and$200billionin2025!GrowthtoIntroductio
5、ndatehascomefromacombinationoftechnologydisplace-ment,asexemplifiedbyautomotivepressuresensorsandSustainedadvancesofcontemporarymicrocomponentsairbagaccelerometers,newproducts,suchasminiaturizedhavemadethemubiquitous.Today,thesecomponentsareguidancesystem
6、s,andMEMSRFdevices.MuchoftheusedinmultitudeofapplicationsrangingfromeverydaygrowthinMEMSbusinessisexpectedtocomefromuse(e.g.,automotivesubsystemsandhouseholdappliances)productsthatareinearlystagesofdevelopmentoryettobethroughnationalsecurityapplicationsto
7、spaceexploration.invented.SomeoftheseproductsincludedisposablechipsForexample,Fig.1illustratessomeofthemicrodevice-forperformingassaysonbloodandtissuesamples,whichbasedsubsystemsusedinautomobilesforfuelinjection,arenowperformedinhospitallaboratories,integ
8、ratedtirepressuresensors,inertialmeasurementunits(IMUs),opticalswitchingandprocessingchips,aswellasvariousandairbagdeployment.RFcommunicationandremotesensingproducts.InTheseautomotiveaswellasanumberofotherpresent-pa
