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Ceramic sensors for humidity detection-- the state-of-the-art and future developments

Ceramic sensors for humidity detection-- the state-of-the-art and future developments

ID：39356864

大小：2.21 MB

页数：22页

时间：2019-07-01

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1、BCHEMICALELSEVIERSensorsandActuatorsB23(1995)135-156Ceramicsensorsforhumiditydetection:thestate-of-the-artandfuturedevelopmentsEnricoTraversaDipartimentodiScienzeeTecnologieChimiche,Universit,~diRoma'TorVergata"viadellaRicercaScientifica,00133Rome,ItalyReceived1

2、5September1993;accepted20September1994AbstractThepossibleapplicationsofhumiditysensorsinautomatedsystemsforenvironmentalcontrolencompassmanyindustrialanddomesticfields.Verydifferentoperatingtemperaturesandavarietyofhumidityrangesareneededforthesepurposes.Thediff

3、erenthumidity-sensingmechanismsandoperatingprinciplesidentifiedforceramicsarereviewed.Ceramichumiditysensorsaredividedintoionic,electronic,solid-electrolyteandrectifying-junctiontypes.Examplesoftheperformanceofsomeceramicsensorsarepresented.Thecorrelationbetween

4、themicrostructureofceramicmaterialsandtheirhumidity-sensitiveelectricalresponseisdiscussed.Theimprovementoftheperformanceofionic-typehumiditysensorsbytheadditionofalkaliionsisexplainedintermsofinfluenceonthemicrostructureandontheintrinsicimpedance.Therecenttrend

5、towardstheminiaturizationandintegrationofsensorsonasinglechiprequirestheproductionofceramicfilms.Ceramicthinfilmspreparedbysol-gelorsputteringprocessesareinvestigated.Theresultsobtainedonthehumiditysensitivityofp--nsemiconductingoxideheterocontactsarealsoreporte

6、d.Keywords:Ceramicsensors;Humiditydetection1.Introductionorthedewpoint,butmoreoftenitisimportanttocontroltherelativehumidity(rh).MonitoringandcontrollingenvironmentalhumidityAwidevarietyofmaterialshasbeenstudiedasisreceivingeverwiderattention,mainlyforcomfortsen

7、singelementsinhumiditysensorsandusedforandforindustrialprocesses[1].Thetrendtowardscommercialdevices.Thechoiceofasuitablematerialusingautomatedcontrolsystemshasrecentlygainedisdifficult,andshouldbebasedonmaterialsthatshowimportanceinenvironmentalcontrolbecauseof

8、thegoodsensitivityovertheentirerangeofhumidityandfallingcostofinterfacecircuitsandmicroprocessors,temperature,lowhysteresis,andpropertiesthatareandtheirimprovedreliab

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