EBSD sample preparation 试样的制备和抛光

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1、EBSDspecimenpreparationtechniquesYongjunChenTheNorwegianUniversityofScienceandTechnology(NTNU),DepartmentofMaterialsTechnology,Email:kgcyj_123@163.com1TrondheimMay16,2011•MechanicalpolishingsequencesuggestedbyEDAXTSLStepsMethodsTime1Sectionandmountthesample2Grinduntilp

2、lanarusing240gritSiCpaper3400gritSiCpaper15-20seconds4600gritSiCpaper15-20seconds5800gritSiCpaper15-20seconds61200gritSiCpaper15-20seconds,thisstepmayberepeated2-3times79microndiamondsolution5-10min83microndiamondsolution5-10min91micronalphaaluminasolution5-20min100.3m

3、icronalphaaluminasolution5-15min110.05microncolloidalsilicasolutionAbove1min2TrondheimMay16,2011Outlineoffinalpreparationtechniques1.Silicapolishing2.Electropolishing3.Chemicaletching4.FIB5.IonMilling6.HitachipolisherNote:Manysampleshavetheirownrequirementsforpreparati

4、on.3TrondheimMay16,20111.SilicapolishingSilicasolutionconsistsofnegativelychargedparticlesofsilicondioxide(SiO2)withapHvaluebetween8and11.Thesolutionpolishesandslightlyetchesthespecimen,removingmostofthesurfacedeformationlayer.Thissolutionworkswellwithnearlyallmaterial

5、s,withparticulareffectivenessonceramicandgeologicalsamplesthatareotherwisedifficulttoprepare.Comment:Notthefirstchoicemethod.NotgoodforAl,TiandMgsamples.4TrondheimMay16,2011SeriesofBSEimages(a-d)andcorrespondingEBSPs(e-l)aftervariouspolishingstagesontheduplexsteel.5Ser

6、iesofBSE(a-c)FSD(d-f)andcorrespondingEBSPs(g-i)fromthealuminasampleaftervariousmechanicalpolishingstages.62.Electropolishing•Removesmaterialfromthesurfaceofthesamplebyelectrolyticaction•Worksverywellonmanymetals.•Findanidealsolutionforyoursampleonhttp://www.struers.com

7、orfromaliterature.•electrolytesthatareusedtoproduceTEMthinfoilscanbeusedonbulkspecimens•Comments,•1.Nouniversalelectrolytethatworkswithallmaterials•2.Manysolutionshaveashortshelflife.•3.ThemostpopularandeffectivemethodforEBSDsofar.•4.Quick,10sto1min.7CommonProblemswith

8、electropolishingandhowtodo?8Youshouldbeabletodolikethesewithelectropolishing(Rawdata,withoutcleanup)Titanium(alloys)M