硅纳米线的制备工艺研究

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1、分类号：TB383密级：公开论文编号：201801030813贵州大学2018届硕士研究生学位论文硅纳米线的制备工艺研究学科专业：化学工程与技术研究方向：化工﹒能源材料导师：唐安江（教授）研究生：黄崇中国﹒贵州﹒贵阳2018年04月贵州大学2018届硕士研究生学位论文目录摘要.........................................................................................................................IAbstract...................

2、...............................................................................................II第一章绪论..........................................................................................................11.1引言.........................................................................

3、.................................11.2硅纳米线的性质及应用..........................................................................21.2.1硅纳米线的特性...........................................................................21.2.2硅纳米线的应用.................................................................

4、..........51.3硅纳米线的生长机理..............................................................................61.3.1VLS生长机理..............................................................................71.3.2SLS生长机理...............................................................................91.

5、3.3OAG机理...................................................................................111.4硅纳米线的制备方法——按硅源分类................................................121.4.1硅粉及金属制成的硅靶.............................................................131.4.2含氧硅化物.....................................

6、............................................131.4.3单晶硅片.....................................................................................141.4.4气态硅化物.................................................................................151.4.5硅源小结...........................................

7、.........................................171.5硅纳米线的表征方法............................................................................181.5.1扫描电子显微镜.........................................................................181.5.2能谱分析仪................................................