APCVD法制备硅化钛纳米线、薄膜及其性能的研究

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1、浙江大学硕士学位论文APCVD法制备硅化钛纳米线、薄膜及其性能的研究姓名：郝鹏申请学位级别：硕士专业：材料学指导教师：杜丕一20060601纳米线的形成。此外，APCvD法在薄膜层上还生长出纳米针、核(品)一鞘(非晶)纳米线等多种一维纳米结构。APcvD法在单晶硅上同样可以制各出硅化钛薄膜和纳米线，由于硅衬底参与反应会导致薄膜中形成少量高阻相Ti5si3，而纳米线直接在薄膜上形核并一维定向生长，其形成与薄膜下的衬底无关。关键词：APCVD硅化钛薄膜晶相形成纳米线生长机理ABSTRACTTheFlatPan

2、elDisplays(FPDs)arerapidlydevelopingin21“century．Novelmaterialswiththelowerresistivi妙arerequiredforcomactelectrodesoftheFPDstoenhancemerespondperfornlance．Besides，Fabricationofthe丘eId—e皿tcersofFieIdEmissionDisplays(FEDs)istoocomplextostepforward．Thecombin

3、ationofconductivethinfilmsandnanowiresdepositedonlargeareaglassbysimplemethodswithlowcostwi儿solvemeaboveDrobIems．Inmisthesis，t11efilmsandnaIlowiresoftitaniumsilicideswerepreparedonthe91asssubstratebyatmoSpherepressurechemicalvapordeposition(APcVD)，usingSi

4、}王4andTiCl4asprecursors．XRD，FESEM，EDX，UV—VISspectrometera11dFour-poimprobewereemployedtochamcterizestnJcturea11dpropeniesofthefilms，respectively．ThephasefonnationinthefilmsandcVDreactionwerestudied．Thefomlationand掣owtllofTiSinaI】o、vireswerealsocl撕fied．The

5、resultsreVealmattlledepositionofthefilmsisdetemlinedbyCVDreactionbetweenSiH4andTiCl4．ViacontrollingtheCVDreactjontopromotemeTiSi2fornlationandd印resstheTi5Si3fomationatthes咖etime，theTiSi2fihnscallbegainedwiththelowresistivity．ThemechanismofⅡ1efilmsdepositi

6、onisdescribedasbelow：SiH4andTiCl4directlyreactedinmev印orphaseatfirst，andthenmeTiSi2grainsdepos“edont11eglasssubstrate．ThestackdensityoftheTisi2crystallinephasegraduallyincreasedandtllepaniclesgrewup．Thefllmsc眦etocontinuousa11dunifonn，resultinginthelowresi

7、stivity．Thein丘aredreflectionrelysmuchonthephasefonllationinthe矗lms．ImpmvingtheconcentrationoftheTisi2crystallinephase，decreaSingmesheetresistancewi儿enhanceofthei血aredreflectionof廿1eTiSi2films．IIITheTiSicrystallinenano、vireswitht11eorthorhombicstmcturewere

8、preparedonmeTiSi2fllmsdepositedonglasssubstrate．Thelen百hofthenallowiresismorethanseVeralmicrometerswiththewidthbet、veen20工1111and40m．ThegroⅢhdirectionis[ol1]Thegro叭hpmcessinvolvesthesel“nducedgro叭hofTisinaIlowiresvi