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1、INSTRUCTIONMANUALMULTI-STAGEDRYVACUUMPUMPA70W(A70W-S,A70W-C)A30W(A30W-S,A30W-C)A25S(A25S-S)A10S(A10S-S)A07V(A07V-S)idealvac.com(505)872-0037idealvac.comDonotreproduceorreprintanyportionofthismanualwithoutpermission.Manufacturerreservestherighttodiscontinueorchangeanyspecificationsordesign
2、swithoutnoticeandwithoutincurringobligations.Allrightsreserved,copyrightEBARACorporation.(i)RecordofChangesRev.DatePagePositionContentsReason02-Jun-94Newlyissued113-Jul-945A07VSpec.PumpingSpeedCorrection6-10OutlineDrawingWaterSup./RtnAddNPT14Fig.3.4Sys.FlowAddNote17Fig.4.2CouplerAddDrawin
3、g21Fig.4.6Ctrl.WiringCorrection22Table4.5PinAssign.Addnote214-Nov-96ⅲ,ⅳFig.1,2,3,4,5SafetywarningAddlabelsDrawingWarninglabelAddⅴ,ⅵ,ⅶLocation3.3ListDetailedAddList4specificationsDig.4.4PowerSup.RecCorrection21Table4.6DipswitchDesignChange25Fig.4.7S.WsettingDesignChange26Table6.1Typicalche
4、ckAddTable33items6.3SparePartsAddList35,367(8)PumpLiftingAddNote379ServiceNet.AddList44,45A12-Dec-97NewreleaseperECO2905320-May-9921Tab.4.2SuitablewireCorrection44,459.ServiceNetworkJapan,TaiwanChange(Add.,Phone,Fax)5,6,18,-----TheUnitwas-----27,28,changedinterms32ofDomesticregulationforM
5、easurementlow.3A27-Apr-01ETIreleaseofECRev3perECO5394.3BJune200220AddULgroundingThird-partynotemarkingivAddLCD“hotThird-partysurface”notemarkingAddappendicesSEMIS2ThruoutLanguageEditECO5771EBARACorporation(ii)SafetyInformationAnyoneoperatingthispumpmusthavetheknowledgetoidentifyandavoidha
6、zardousconditionsassociatedwiththepump.Rashactionsorimproperoperationmaycausedangerousaccidentsandseriousinjuries.Beforeinstallationandoperation,theoperatorfirstshouldhaveathoroughknowledgeofthepump’sconstruction,operatingprocedures,andhazards.Theoperatorshouldreadthisinstructionmanualand
7、otherdocumentsissuedbyEBARA.Ifyouhaveanyquestionsonpumpoperation,safety,ormaintenance,pleasedonothesitatetocontactEBARAdirectly.Threetermsinthismanualdesignatedifferentlevelsofhazard:indicatesanimminentlyhazardoussituationthat,ifnotavoided,willDANGERresultindeathors
