激光—超精密磨削协同加工碳化硅的表面与亚表层损伤研究

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1、硕士学位论文激光-超精密磨削协同加工碳化硅的表面与亚表层损伤研究InvestigationofSub-SurfaceDamageofSiliconCarbide(SiC)ManufacturedbyLaserMachineandUltra-precisionPrecisionGrindingIBIJOLAVICTORBABAJIDE哈尔滨工业大学2016年7月国内图书分类号：TH162+.1学校代码:10213国际图书分类号：621密级：公开工学硕士学位论文激光-超精密磨削协同加工碳化硅的表面与亚表层损伤研究硕士研究生：IBIJOLAVICTORB

2、ABAJIDE导师：赵清亮教授申请学位：工学硕士学科：机械制造及其自动化所在单位：机电工程学院答辩日期：2016年7月授予学位单位：哈尔滨工业大学ClassifiedIndex:TH162+.1U.D.C:621DissertationforMasterDegreeinEngineeringInvestigationofSub-SurfaceDamageofSiliconCarbide(SiC)ManufacturedbyLaserMachineandUltra–PrecisionGrindingCandidate：IbijolaVictorBab

3、ajideSupervisor：Prof.ZHAOQingliangAcademicDegreeAppliedfor:MasterofEngineeringSpecialty：MechanicalManufacturingandAutomationAffiliation：Dept.ofMechatronicsDateofDefense：July,2016Degree-Conferring-Institution:HarbinInstituteofTechnology,ChinaDissertationforMasterDegreeinEnginee

4、ring,HITAbstractLasermicromachininghasexcitedvividattentioninvariousindustrialengineeringfieldsandinmedicine,owingtotherapidprogressinlaserdesign.However,whenirradiatingthefocusedlaserpulsestoremovethemateriallocallyespeciallyinananosecondlaser,themachinedsurface,sub-surfacean

5、dsurroundingscanbeeasilythermallydamagebytheplasmaformationcausedbyexcessivelaserincidence.Suchdamagesusuallydeterioratethequalityoflasermachinedsurface.Researchhasidentifiedthat,operationalreliabilityofmachines‟componentsdependsonthemanufacture/fabricationaccuracy.Improvingth

6、esurfaceandsubsurfacequalityhavebeenthemostchallengedissuesinthelasermachiningfields.Thisexperimentalstudyismainlyaboutinvestigationofsub-surfacedamageofSiliconCarbide(SiC)micro-machinedbyNanosecondpulselasermachineandprecisiongrindingNanosecondlaserhasbeenknownforgoodmicrostr

7、ucturingfabricationprocess,itsmicromachiningtechnologyisoneoftheeffectivemethodsforprecisionprocessingofhardandbrittlematerials.Ithasbeenknownforitsuniqueadvantages,especiallyformicromachiningofhardmaterialssuchasSiliconcarbide(SiC).However,subsurfacedamageinducesintotheworkpi

8、ecebyitsoperationcouldbeinevitable.Inrespectofthis,thepresent