微晶玻璃超精密磨削的表面∕亚表面损伤及其材料去除机理研究.pdf

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1、第53卷第7期机械工程学报Vol.53No.72017年4月JOURNALOFMECHANICALENGINEERINGApr.2017DOI：10.3901/JME.2017.07.180微晶玻璃超精密磨削的表面/亚表面损伤及其材料*去除机理研究高尚朱祥龙康仁科郭东明王紫光张璧(大连理工大学精密与特种加工教育部重点实验室大连116024)摘要：针对微晶玻璃超精密磨削加工不可避免的表面/亚表面损伤问题，通过微晶玻璃磨削试验研究500#、1500#、2000#和5000#金刚石砂轮磨削微晶玻璃的表面形貌、表面/亚表面损伤特征及其材料

2、去除机理，揭示微晶玻璃脆性域磨削和塑性域磨削的表面/亚表面损伤特征，提出依次采用500#金刚石砂轮粗磨和5000#金刚石砂轮精磨的微晶玻璃高效低损伤磨削工艺。结果表明，500#和1500#金刚石砂轮磨削表面的材料去除方式为脆性断裂去除，2000#金刚石砂轮磨削表面的材料去除方式同时包括脆性断裂去除和塑性流动去除，5000#金刚石砂轮磨削表面的材料去除方式为塑性流动去除；脆性域磨削微晶玻璃的表面损伤形式为凹坑、微裂纹、深划痕，亚表面损伤形式为微裂纹；塑性域磨削微晶玻璃的表面损伤形式为微磨痕，亚表面损伤形式为靠近磨削表面的材料的塑性流

3、动。关键词：微晶玻璃；磨削；表面损伤；亚表面损伤；材料去除机理中图分类号：TH706Surface/SubsurfaceDamageandMaterialRemovalMechanismofGlass-ceramicsInducedbyUltra-precisionGrindingGAOShangZHULianglongKANGRenkeGUODongmingWANGZiguangZHANGBi(KeyLaboratoryforPrecisionandNon-traditionalMachiningTechnologyofMini

4、stryofEducation,DalianUniversityofTechnology,Dalian116024)Abstract：Thesurface/subsurfacedamageisgeneratedinevitablyingrindingglass-ceramics.Inthisstudy,thesurfacetopography,surface/subsurfacedamagecharacteristicsandmaterialremovalmechanismofglass-ceramicsgroundbydiamo

5、ndwheelswithdifferentabrasivesizesof500#,1500#,2000#and5000#areinvestigated.Thesurface/subsurfacedamagecharacteristicsofglass-ceramicsinbrittle-modegrindingandductile-modegrindingrespectivelyarerevealed,andahigh-efficiencyandlow-damageultra-precisiongrindingprocessofg

6、lass-ceramicsbystagesusing500#diamondwheelforroughgrindingand5000#diamondwheelforfinegrindingisproposed.Theexperimentresultsshowthatthematerialisremovedinbrittlemodewhenglass-ceramicsaregroundby500#and1500#diamondwheels,inbothbrittlemodeandductilemodewhengroundby2000#

7、diamondwheel,andinductilemodewhengroundby5000#diamondwheel.Inthebrittle-modegrindingofglass-ceramics,thesurfacedamageconsistsofpits,microcracksanddeepscratches,andthesubsurfacedamagetakestheformofmicrocracks.Butintheductilemodegrindingofglass-ceramics,thesurfacedamage

8、hasonlymicro-scratches,andsubsurfacedamageistheplasticflowofworkpiecematerialclosedtothegroundsurface.Keywords：glass-ceramic