study on peeling behavior in pick-up process of ic chip with adhesive tapes.pdf

study on peeling behavior in pick-up process of ic chip with adhesive tapes.pdf

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时间:2019-03-20

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1、JournalofSolidMechanicsVol.4,No.7,2010andMaterialsEngineeringStudyonPeelingBehaviorinPick-upProcessof*ICChipwithAdhesiveTapes******NaoyaSAIKI,KazuakiINABA,KikuoKISHIMOTO,******HideoSENOandKazuyoshiEBE**DepartmentofMechanicalSciencesandEngineering,TokyoInstituteofTechnology,2-12-1Ookayama,Megu

2、ro-ku,Tokyo,152-8550JapanE-mail:saiki.n.aa@m.titech.ac.jp(n-saiki@post.lintec.co.jp)***LINTECCorporation,5-14-42Nishiki-cho,Warabi-shi,Saitama,335-0005JapanAbstractAmethodtoevaluatepick-upperformanceoffourkindsofadhesivetapematerialswithdifferentthicknesshasbeenstudiednumericallyandexperiment

3、ally.NeedlespeelanICchipwithanadhesivefilmoffthebasematerialinthepick-upprocess,bypushingthebackofthebasematerial.Inourevaluationmethod,thedependenceofthepeelenergyonthepeelspeedwasmeasuredusingapeeltest.Thefiniteelementmethodwasappliedtocalculatetheenergyreleaserateofthepick-upprocessforvari

4、ouspeellengths.Thepick-uptimewasobtainedfromtheresultsofthepeeltestsandthefiniteelementanalysis.Ourresultsindicatethatthepeelenergyisthedominantpropertyinfluencingthepick-upperformance,andthedifferenceinenergyreleaserateinthepick-upprocessbetweenthesamplesisnotsignificant.Furthermore,theminim

5、umneedledisplacementwasestimatedfromthecalculatedpick-uptimeusingourmethod.Theminimumneedledisplacementoftheexperimentalpick-upvalueswasingoodagreementwiththeestimatedresult.Keywords:Adhesive,PeelTest,PolymerMaterials,ElectronicMaterials,Interface1.IntroductionIncreasingmarketdemandhasdrivent

6、hesemiconductorindustrytominiaturizeallthematerialsusedinsemiconductorpackaging(Fig.1).TheadhesivesthatbondICchipstothesubstratehavealsofollowedthemarkettrendtowardsminiaturization.Filmadhesivesareabletosatisfythisdemand,andarenowwidelyused,havingreplacedconventionalliquidadhesives.Suchadhesi

7、vesarethinnerandmoreuniformthanliquidadhesives,andthisisthereasonwhyfilmadhesivesenablesmaller,higherfunctionalitydevicesthroughchip(1)stackedtechnologyasshowninFig.1.(a)BladeAdhesivesICchipsAdhesiveICchipBasematerialSolderbumpsSubstrate(b)Ad

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