Introduction to Digital Micromirror Device (DMD) Technology.pdf

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1、ApplicationReportDLPA008–July2008DMD101:IntroductiontoDigitalMicromirrorDevice(DMD)Technology.....................................................................................................................................................ABSTRACTThisdocumentdescribesthebasicstructureando

2、perationofthedigitalmicromirrordevice(DMD)array.1OverviewThisdocumentcoversthebasicstructureandoperationofDMDdevices.TheDMDisauniquecombinationofopto-mechanicalandelectro-mechanicalelements.Thejourneybeginswithunderstandinghowonepixelworksandbuildingonthattoencompasstheentirearrayofpixelstha

3、tcompriseaDMD.2Mirror(Pixel)TheDMDpixel(mirror)isbothanopto-mechanicalelementandanelectro-mechanicalelement.2.1Bi-StableOperation(±12Degrees)TheDMDpixelisanelectro-mechanicalelementinthattherearetwostablemirrorstates(+12degreesand–12degreesforcurrentDMDs)thataredeterminedbyelectrostaticsofth

4、epixelduringoperation.TheDMDpixelisanopto-mechanicalelementinthatthesetwopositionsdeterminethedirectionthatlightisdeflected.Inparticular,theDMDisaspatiallightmodulator.Byconvention,thepositive(+)stateistiltedtowardtheilluminationandisreferredtoastheonstate.Similarly,thenegative(–)stateistilt

5、edawayfromtheilluminationandisreferredtoastheoffstate.Figure1showsapixelintheonandoffstates.DLPA008–July2008DMD101:—IntroductiontoDigitalMicromirrorDevice(DMD)Technology1SubmitDocumentationFeedbackCopyright©2008,TexasInstrumentsIncorporatedMirror(Pixel)www.ti.comFigure1.PixelsinOnandOffState

6、2.2MechanicalMechanicallythepixeliscomprisedofamirrorattachedbymeansofaviatoahiddenyokeandatorsionalhinge.TheyokemakescontactwiththesurfacebelowonthespringtipsshowninFigure2.Thediagramalsoshowsamirrorineachofthetwostablestates.Theyellowelectrodesshownareusedinholdingthemirrorinthesepositions

7、.YokeViaMirrorHingeElectrodesSpringTipsFigure2.PixelwithLabeledParts2DMD101:—IntroductiontoDigitalMicromirrorDevice(DMD)TechnologyDLPA008–July2008SubmitDocumentationFeedbackCopyright©2008,TexasInstrumentsIncorporatedwww.ti.comDMDArray2.3Electrical2