资源描述：
《The Microstructure and State of Stress of Sn Th....pdf》由会员上传分享，免费在线阅读，更多相关内容在学术论文-天天文库。
1、TheMicrostructureandStateofStressofSnThinFilmsafterPost-PlatingAnnealing:AnExplanationfortheSuppressionofWhiskerFormation?1)2)1)3)1)3)2)2)2)Sobiech,M.,Welzel,U.,Schuster,R.,Mittemeijer,E.J.,Hügel,W.,Seekamp,A.&Müller,V.1)MaxPlanckInstituteforMetalsResearch,Stuttgart,Germa
2、nyHeisenbergstraße3,D-70569Stuttgart2)RobertBoschGmbH,Reutlingen,GermanyTübingerStr.123,D-72762Reutlingen3)InstituteforPhysicalMetallurgy,UniversityofStuttgartHeisenbergstraße3,D-70569StuttgartCorrespondencee-mail:m.sobiech@mf.mpg.de,matthias.sobiech@de.bosch.comsurfacein
3、theSnthinfilm,duetotheformationofanAbstractintermetalliccompound(IMC;Cu6Sn5)attheSngrainThepost-platingannealing('post-bake'treatment,boundaries,maybeproposedasadrivingforceforwhiskerannealingat150°Cfor1h)ofpurematteSnthinfilmsonCu-growth[7,16].TheformationofaSn-whiskerca
4、nbebasedsubstratesisknowntobeaneffectivewhiskerregardedasastressreliefphenomenon.Ithasbeenspeculatedmitigationtreatment.ThemicrostructureandthestressstatethatapositivestressgradientfromtheIMCregionneartheofSnthinfilmsonCu-substratesproducedwithandwithoutainterfacewiththes
5、ubstratetowardstheSnlayersurface,as‘post-bake’treatmenthavebeeninvestigatedusingscanningwellasapositivestressgradientontheSnlayersurfacefromelectronandfocusedionbeammicroscopy(SEM&FIB),X-thesurroundingstowardsthewhisker-rootarethecardinalrayphotoelectronspectroscopy(XPS)a
6、ndageingtimeandparameterscontrollingSn-whiskergrowth(see,forexampledepth-dependentX-raydiffraction(XRD)stressanalyses.A[16-18]).SomeauthorsspeculatedthatthepresenceofaSn-comparisonofthemeasuredstress-depthgradientsintheoxidelayerisdecisiveforwhiskerformation[7,16,19]:Then
7、ear-surfaceregionsoftheSnthinfilmsproducedwithandpresenceofastableSn-oxidelayer,disablingvacancysourceswithout‘post-bake’treatmentindicatesdifferencesthatmightandsinksatthesurface,wouldenablethebuilt-upofresidualprovideaplausibleexplanationfortheobservedlong-termmacrostre
8、sses.DuetodifferentstrainsinneighbouringgrainsresistanceagainstwhiskergrowthofSnthinfilmssubject
