Atmospheric pressure chemical vapour deposition of VO2 and.pdf

Atmospheric pressure chemical vapour deposition of VO2 and.pdf

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时间:2019-03-08

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1、ARTICLEwww.rsc.org/materialsChemistryMaterialsJournalofAtmosphericpressurechemicalvapourdepositionofVO2andVO2/TiO2filmsfromthereactionofVOCl3,TiCl4andwaterUzmaQureshi,TroyD.ManningandIvanP.Parkin*DepartmentofChemistry,UniversityCollegeLondon,20GordonStreet,London,UKWC1HOAJReceived17thDe

2、cember2003,Accepted27thJanuary2004FirstpublishedasanAdvanceArticleontheweb24thFebruary2004VanadiumdioxidefilmsweredepositedonglassfromtheAPCVDreactionofVOCl3andwaterat650uC.IntroductionofasecondprecursorTiCl4affectedthegrowthmorphologyoftheVO2filmsbutdidnotincorporateanydetectabletitaniu

3、m.ThefilmswerecharacterisedbyXPS,XRD,Raman,EDAXandSEM.InterestinglytheVO2filmsformedinthepresenceofTiCl4showedareductioninthethermochromicswitchingtemperaturefrom69uCinbulkVO2to49uC.APCVDofTiCl4/VOCl3atasubstratetemperatureof600and550uCaffordedcompositeTiO2/VO2films.Thesefilmsexhibitedphot

4、oinducedhydrophilicity,photocatalysisandathermochromicswitchingtemperatureof51uC.IntroductionaccomplishedbyresistiveelementsthatwereregulatedbyEurothermcontrollersandRStype-kthermocouples.IntelligentwindowcoatingsrespondtoanexternalstimulusVOCl3(AldrichUK,99%)wastransferredtoabubbleran

5、dwithincreasingsophisticationonan‘asneeds’basis,thisdistilledwaterwasinjectedintotheplain-linegas-flowusingaincludesthermochromiccoatings,thesearecoatingsthatfixed-ratesyringe-driver(0.475cmmin21).Theamountofchangereflectance–transmissionpropertieswithtemperature.waterintroducedwascontrol

6、ledviasyringesize.ThesubstrateThermochromicmaterialsareoftencharacterisedbyasemi-wasSiO2-precoatedstandardfloatglass(Pilkington,UK)conductortometaltransitionduetoareversiblechangein15cm64.5cm60.3cm.Theglasssubstratewascleanedstructureasafunctionoftemperature.Thischangehasbeenbeforeuseby

7、beingwipedwithatissuesoakedinwater,thenobservedinanumberoftransitionmetaloxidessuchasTi2O3,withatissuesoakedinpropan-2-olandfinallyrinsedwith1,2Fe3O4andMo9O26,andinseveralformsofvanadiumoxide.propan-2-ol.TheglasswasallowedtodryinairpriortoitAmongthem,VO2hasreceivedsignificantattentionb

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