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ID:34592434
大小:3.32 MB
页数:64页
时间:2019-03-08
《基于单探针和液滴辅助的微构件转移方法和实验-研究》由会员上传分享,免费在线阅读,更多相关内容在教育资源-天天文库。
1、哈尔滨工业大学工学硕士学位论文AbstractThepartsofmicroelectromechanicalsystemsarebecomingsmaller,andthesystemstructuresarebecomingmorecomplexandprecise.Subsequently,theconventionaltransfertoolsbasedonmechanicalgrippingandvacuumadsorbingtendtodeformorevendestroythesurfacesofmicroparts.Thereforeitiscr
2、iticaltoexploreaharmlessmethodtotransfermicroparts.Inordertotransfermicropartsbelow100μmscale,anovelmicropartstransfermethodwiththefunctionofmicroforcesensinghasbeenproposedinthispaper.Thefeasibilityofthemethodhasbeenanalyzedbasedonthecapillaryinteractionmechanism,andbeenverifiedbyth
3、estaticanddynamicsimulationofmicropartstransferprocess.Micropartscanbetransferredeffectivelyonthecorrespondingexperimentsystem.Firstly,themicropartstransfermethodbasedonasingleprobeandauxiliarydroplethasbeenproposed.Therelationshipbetweenthewettingpropertyandthecontactanglehasbeeninv
4、estigated.Thefeasibilityofmicropartstransferbasedoncapillaryforcehasbeenanalyzed.Theprincipleofself-alignmentandtherestoringforcehasbeendiscussed.Comparingtothecapillarytube,thesingleprobehasbeenchosenasthetoolofmicropartstransfer.Themethoddippingindroplethasbeenchosenasthewayofmicro
5、liquidobtainingattheendofsingleprobe.Basedonauxiliarydroplet,themicropartsreleasingschemeofdoubleliquidbridgeshasbeensetup.Thebasicoperationstrategiesoftheprocesses,suchasthedropletformation,themicropartpickingandreleasinghavebeenanalyzed.Secondly,thestaticanddynamicsimulationmodelso
6、fmircopartstransferhavebeenestablished.Basedontheaccuratemethodofliquidbridgemeniscus,thestaticsimulationmodelsunderthesystemconfigurationsofapower-lawparticleandaplane,apower-lawparticle-sphere,asphereandaplanehavebeenbuilt.AccordingtotheJKRadhesiontheory,theadhesivecontactmodelbetw
7、eenthesphereandtheplanehasbeenstudied.Influencesofrelatedparametersontheperformanceofliquidtransferhavebeenanalyzed.Thefeasibilityofmicropartstransferhasbeenverifiedwithaboveanalysis.BasedontheVOFmodelofmultiphaseflow,themicrodropletobtainingandthemicropartsreleasingdynamicmodelshave
8、beenestablis
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