基于单探针和液滴辅助的微构件转移方法和实验研究

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1、哈尔滨工业大学工学硕士学位论文AbstractThepartsofmicroelectromechanicalsystemsarebecomingsmaller,andthesystemstructuresarebecomingmorecomplexandprecise.Subsequently,theconventionaltransfertoolsbasedonmechanicalgrippingandvacuumadsorbingtendtodeformorevendestroythesurfacesofmicroparts.Th

2、ereforeitiscriticaltoexploreaharmlessmethodtotransfermicroparts.Inordertotransfermicropartsbelow100μmscale,anovelmicropartstransfermethodwiththefunctionofmicroforcesensinghasbeenproposedinthispaper.Thefeasibilityofthemethodhasbeenanalyzedbasedonthecapillaryinteractionmec

3、hanism,andbeenverifiedbythestaticanddynamicsimulationofmicropartstransferprocess.Micropartscanbetransferredeffectivelyonthecorrespondingexperimentsystem.Firstly,themicropartstransfermethodbasedonasingleprobeandauxiliarydroplethasbeenproposed.Therelationshipbetweenthewett

4、ingpropertyandthecontactanglehasbeeninvestigated.Thefeasibilityofmicropartstransferbasedoncapillaryforcehasbeenanalyzed.Theprincipleofself-alignmentandtherestoringforcehasbeendiscussed.Comparingtothecapillarytube,thesingleprobehasbeenchosenasthetoolofmicropartstransfer.T

5、hemethoddippingindroplethasbeenchosenasthewayofmicroliquidobtainingattheendofsingleprobe.Basedonauxiliarydroplet,themicropartsreleasingschemeofdoubleliquidbridgeshasbeensetup.Thebasicoperationstrategiesoftheprocesses,suchasthedropletformation,themicropartpickingandreleas

6、inghavebeenanalyzed.Secondly,thestaticanddynamicsimulationmodelsofmircopartstransferhavebeenestablished.Basedontheaccuratemethodofliquidbridgemeniscus,thestaticsimulationmodelsunderthesystemconfigurationsofapower-lawparticleandaplane,apower-lawparticle-sphere,asphereanda

7、planehavebeenbuilt.AccordingtotheJKRadhesiontheory,theadhesivecontactmodelbetweenthesphereandtheplanehasbeenstudied.Influencesofrelatedparametersontheperformanceofliquidtransferhavebeenanalyzed.Thefeasibilityofmicropartstransferhasbeenverifiedwithaboveanalysis.Basedonthe

8、VOFmodelofmultiphaseflow,themicrodropletobtainingandthemicropartsreleasingdynamicmodelshavebeenestablis