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1、Chapter9NanogranularMagneticCoreInductors:Design,Fabrication,andPackagingGopalC.Jha,SwapanK.Bhattacharya(*ü),andRaoR.Tummala9.1IntroductionTechnologicaladvancesoftenleadtoatransitionwhenthevisionofthepastnolongerremainsavisionandbecomesthedemandofthepresent.Miniaturized,cost-effective,and
2、megafunctionaldevicesarethepresentdaysdemand.WithMooreslawdrivingtheminiaturizationofactivedevices,passivecomponentshavebeenleftbehind.Asthetrendcontinuestowardminiaturization,electronicindustriesareexperiencinganimmensedemandforminiaturizedandmoreefficientpassivecomponents.Presently,high
3、-endelectronicdevicesarecomposedofalmost90%passivecomponents,takingupalmost70%ofthetotalboardarea[1,2].Inductorsareimportantpassiveelementsreadilyusedinmilitary,communication,automotive,computer,andotherportabledevices.Theyareofutmostimportanceforhighfre-quencyapplications,especiallyinwir
4、eless/radiocommunicationdevices.Inductorisagenerictermforcomponentshavingspecificinductancethatcanbeusedtostoreenergyintheformofamagneticfield[3].Theycoverawiderangeofapplica-tionsincludingDCDCconverters,voltage-controlledoscillators,clocks,filters,poweramplifiers,lownoiseamplifiers,volta
5、geregulatormodules,phase-lockedloops,andpointofloadconverters.Recently,significantattentionhasbeengiventoachievehigh-qualityfactor(Q-factor)inductorswithsignificantsizeandcostreduction.Variousworkshavebeencarriedoutbydifferentresearchgroupstobringoutanefficientwayformorecompactpackaging.E
6、fficientdesignshavebeenmadeandstudiedtoincreasethequalityfactorandinductanceofthedevices,includinginnovativedesignsreportedbyPatranabisetal.[4],ParkandAllen[57],andChuangetal.[8].Yamaguchietal.studiedandreportedmicroslits[9,10]andsurfaceplanarization[11].Allen[12]studiedmicroelectromechan
7、icalsystem(MEMS)-basedinductors.However,thehuntforhigh-qualityfactorandhighinductancehasneverceased.Thischapterpresentsacomprehensivereviewofinductorresearch,includingdesign,fabrication,material,characterization,andpackaging,withspecialattentionK.BhattacharyaHenkelL
