飞秒激光辐照下薄膜材料表面微纳结构的快速成型

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1、万方数据AbstractInthisthesis，wehaveadoptedfemtosecondlaserpulsestoproducesurfacemicrostructuresondifferentmetalthinfilmssuchasgold，chromeandmicrocrystallinesiliconfilm．Andourspecificworkandmainconclusionsaredescribedasfollows：1)Femtosecondlaserablationofgoldfilm

2、isstudied．Itisshownthatboththeincidentlaserfluenceandthenumberofpulseoverlappinghaveasignificantimpactonthesurfacemorphologyanddamagethreshold．Meanwhileasinglepulsewithasuitablelaserfluencecanforma‘hill-like’embossmentonthesurfaceofgoldfilm，whichCanbeattribu

3、tedtothefluidjettingofmoltenmaterialduetothehightemperatureandpressuregeneratedontheinterfacebetweenthegoldfilmandsiliconsubstrate．2)Twodifferenttypesofmicrostructuresareinducedonchromefilmbythesinglebeamoffemtosecondlaserswiththewavelengthof800rimandthepuls

4、elengthof50fs．OnetypeiscalledasreliefType-Cstructurewiththerippleorientionparalleltothevectoroflaserelectricfieldandthespatialperiodofabout650nm；whiletheotheriscalledasthedeep-subwavelengthrippleswiththeorientationperpendiculartothelaserelectricfieldvectoran

5、dthespatialquasi—periodofabout100nin．ThenwemainlyinvestigatethereliefType-Cstructure，andourexperimentalresultsshowthewindowprocessingconditionsandtheimpactoflaserparameters，thefilmpropertiesandthesubstratematerialsonitsformation．Thepreliminaryanalysisreveals

6、thatthereliefType—Cstructureisaresultoftheinterferencebetweenthereflectedlaserfieldfromsubstrateandtheinducedsurfaceplasmonwavesofthemetallicnanoparticlesinthefilm．3)BasedonthefirststepoffabricatingthereliefType-Cstructure，wehaveintroducedthesecondstepoflase

7、rbeamincidenceonthesamearea，andproduceanewtypeofmicrostructures．Duringthetwo-stepcross-polarizationscanningexperiments，thefollow-upfemtosecondlaserpulsescaninducethedot-arraystructureinsidethevalleybetweentworelieflines．ThenwerepresentthesurfaceIl万方数据Abstrac

8、tmorphologyofhybridripple-notarraystructureanddemonstratehowthelaserparametersinfluencetheirgenerations．Itisfoundthatthespatialperiodofthedot。arraydistributionalongthereliefrippleisstronglydeter