A lift force sensor with integrated hot-chips for wide.pdf

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1、SensorsandActuatorsA109(2003)120130Aliftforcesensorwithintegratedhot-chipsforwiderangeflowmeasurementsNiklasSvedin∗,EdvardKälvesten,GöranStemmeDepartmentofSignals,SensorsandSystems,RoyalInstituteofTechnology,S-10044Stockholm,SwedenReceived15April2003;accepted20May2003AbstractTheliftforce

2、gasflowsensorusestheforcenormaltothefluidflowtomeasuretheflowvelocity.Twothinplatesmountedatananglearedeflectedwhentheyaresubjectedtofluidflow.Bycombiningthemechanicalliftforcesensorandathermalhot-chipsensorwenowhaveobtainedasensorcapableofhighsensitivityinbothhighandlowflows.Boththethermalandt

3、henon-thermalpartsoftheflowsensorhavenon-linearflowdependenciesleadingtoaflowdependentsensitivitywherethehot-chipparthasitshighestsensitivityforlowflowsandtheliftforceparthasitshighestsensitivityforhighflows.Whenconnectedinanaccelerationinsensitivebridgeconfiguration,theliftforcesensorisbasic

4、allyinsensitivetothedirectionoftheflowbutcombinedwithadualhot-chipconfiguration,bi-directionalityhasbeenaccomplished.Herethishasbeenshownbymeasuringthemagnitudeusingthemechanicalliftforceprincipleandusingadualhot-chipconfigurationfordirectiondetection.Thisisdemonstratedinasimulatedventilat

5、ormeasurement.©2003ElsevierB.V.Allrightsreserved.Keywords:Gasflowsensor;Liftforce;Anemometer;Piezoresistive1.Introductionliftforcesensorhasbeenshowntofulfillthisrequirement[4].TheliftforcesensorisalsocompensatedforcommonMicromechnicalgasflowsensorscanbedividedintotwomodemechanicalinfluences

6、,e.g.,acceleration[5].majorcategories:thermalandnon-thermal[1].Theformer,Theliftforcesensorhasshowngoodsymmetrybetweenbeingthemostcommon,ischaracterizedbyhighsensitiv-thepositiveandnegativeflowdirections,buttheoutputsig-ityforlowflows,smallsizeandnon-linear,root-like,flownalgivesnoinformat

7、ionaboutthedirectionoftheflowwhendependence.Thenon-linearityleadstodecreasingsensitiv-connectedintheaccelerationinsensitivebridgeconfigura-ityforincreasingflowvelocity.Usually,italsorequiresdrytion.Duetoitsquadraticflowdependenceitalsohasarela-andcleangases.Presenceofhumidityordirt